Spectral encoding of spatial frequency approach for characterization of nanoscale structures

被引：25

作者：

Alexandrov, Sergey A. ^{[1
]}

Uttam, Shikhar

Bista, Rajan K.

Staton, Kevin

Liu, Yang

机构：

[1] Univ Pittsburgh, Dept Med, BOIL, Pittsburgh, PA 15232 USA

来源：

APPLIED PHYSICS LETTERS | 2012年 / 101卷 / 03期

关键词：

MICROSCOPY; SPECTROSCOPY;

D O I：

10.1063/1.4737209

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An approach to acquire axial structural information at nanoscale is demonstrated. It is based on spectral encoding of spatial frequency principle to reconstruct the structural information about the axial profile of the three-dimensional (3D) spatial frequency for each image point. This approach overcomes the fundamental limitations of current optical techniques and provides nanoscale accuracy and sensitivity in characterizing axial structures. Numerical simulation and experimental results are presented. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4737209]

引用

页数：5

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