Theory and application of an optimal design method for capacitive six-axis force/torque sensors

被引：6

作者：

Pu, Minghui ^{[1
,2
]}

Zhang, Jinhao ^{[1
]}

Luo, Qi ^{[1
]}

Ai, Zhenjun ^{[1
]}

Liang, Quan ^{[1
]}

Cai, Baocheng ^{[1
]}

机构：

[1] Guangxi Univ, Sch Mech Engn, Nanning 530004, Peoples R China

[2] Guangxi Key Lab Mfg Syst & Adv Mfg Technol, Nanning 530004, Peoples R China

来源：

MEASUREMENT | 2022年 / 203卷

关键词：

Six -axis force; torque sensor; Capacitive sensor; Finite element method; Optimal design; Error analysis; OPTIMIZATION;

D O I：

10.1016/j.measurement.2022.112009

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

An optimal design method for high-precision capacitive six-axis force/torque sensors is studied. A new accuracy metric for the optimal design is proposed by describing the sensing principle, analyzing the error expressions. The method of optimization algorithm combined with finite element simulation is used to build the framework of the optimal design method. The optimal design method is combined with a global optimization algorithm to optimize the design variables of a reasonable structure. The result of the optimization is made into a prototype, and the performance is verified by calibration experiments. The experimental results show that the nonlinearity of the prototype is 0.552 %FS and the crosstalk of the prototype is 0.682 %FS. The design method proposed in this paper can design a high-performance capacitive six-axis force/torque sensor effectively.

引用

页数：10

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