New application of classical X-ray diffraction methods for epitaxial film characterization

The quality of an epilayer is characterized by its in-plane misfit and orientation with respect to the substrate, its out-of-plane cell parameter, its orientation distribution and its in-plane and out-of-plane strains. We adapted the Weissenberg equi-inclination geometry such that combined with a powder diffractometer it provides all the information mentioned, in two single scans. The powder diffractometer data are used to determine the out-of-plane texture of the film, while the photographic Weissenberg film provides a complete overview of the in-plane characteristics. The method can be performed with standard laboratory equipment in a simple and reliable way. The method is illustrated with four different epilayer/substrate systems.