Design and Implementation of T-type MEMS heart sound sensor

被引：17

作者：

Pei, Yu ^{[1
]}

Wang, Weidong ^{[1
]}

Zhang, Guojun ^{[1
]}

Ding, Junwen ^{[1
]}

Xu, Qingda ^{[1
]}

Zhang, Xiaoyong ^{[1
]}

Yang, Shenghui ^{[1
]}

Shen, Nixin ^{[1
]}

Lian, Yuqi ^{[1
]}

Zhang, Lansheng ^{[1
]}

Wang, Renxin ^{[1
]}

Zhang, Wendong ^{[1
]}

机构：

[1] North Univ China, State Key Lab Dynam Testing Technol, Taiyuan 030051, Shanxi, Peoples R China

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2019年 / 285卷

基金：

美国国家科学基金会;

关键词：

MEMS sensor; Heart sounds; Piezoresistive principle; Bionic principle;

D O I：

10.1016/j.sna.2018.11.041

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In view of low sensitivity of traditional stethoscope and valuableness of existing intelligent electronic stethoscope, a T-type MEMS heart sound sensor with high sensitivity, low cost and high SNR is designed, which is combined with MEMS technology, bionic principle, piezoresistive principle and Wheatstone bridge detection principle. Firstly, working principle of T-type MEMS heart sound sensor is introduced; Secondly, theoretical model of T-type sensitive microstructure is established, and its performance is simulated and analyzed by ANSYS finite element simulation software, then the size of T-type sensitive microstructure is determined and T-type MEMS heart sound sensor is made. Finally, T-type MEMS heart sound sensor prototype is tested. The results of tests show that: sensitivity and working frequency band of T-type MEMS heart sound sensor are respectively -183dB@500 Hz and 0-1000 Hz, which have verified correctness and practicability of T-type microstructure. In addition, the acoustic properties of S1 and S2 are analyzed from time domain and frequency domain, which indicates that heart sound signals detected by T-type MEMS heart sound sensor are highly consistent with that of 3200-type electronic stethoscope of 3 M company. Moreover, SNR of T-type MEMS heart sound sensor is 7.9 dB higher than 3200-type electronic stethoscope of 3 M company. The above shows that the T-type MEMS heart sound sensor can provide a powerful basis for early accurate diagnosis of cardiovascular disease and has broad prospects in the field of heart sound detection. (C) 2018 Elsevier B.V. All rights reserved.

引用

页码：308 / 318

页数：11

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