A metrological Scanning Probe Microscope based on a quartz tuning fork detector

被引：1
|
作者：
Babic, Bakir [1 ]
Freund, Christopher H. [1 ]
Lawn, Malcolm [1 ]
Miles, John R. [1 ]
Herrmann, Jan [1 ]
机构：
[1] Natl Measurement Inst Australia, Lindfield, NSW 2070, Australia
来源：
SCANNING MICROSCOPIES 2011: ADVANCED MICROSCOPY TECHNOLOGIES FOR DEFENSE, HOMELAND SECURITY, FORENSIC, LIFE, ENVIRONMENTAL, AND INDUSTRIAL SCIENCES | 2011年 / 8036卷
关键词：
mSPM; AFM; non-contact mode; quartz tuning fork; frequency modulation; PLL; CALIBRATION;
D O I：
10.1117/12.884567
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
We give an overview of the design of a metrological Scanning Probe Microscope (mSPM) currently under development at the National Measurement Institute Australia (NMIA) and report on preliminary results on the implementation of key components. The mSPM is being developed as part of the nanometrology program at NMIA and will provide the link in the traceability chain between dimensional measurements made at the nanometre scale and the realization of the SI metre at NMIA. The instrument is based on a quartz tuning fork (QTF) detector and will provide a measurement volume of 100 mu m x 100 mu m x 25 mu m with a target uncertainty of 1 nm for the position measurement. Characterization results of the nanopositioning stage and the QTF detector are presented along with an outline of the method for tip mounting on the QTFs. Initial imaging results are also presented.
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页数：10
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