Wet-cleaning of contaminants on the surface of multilayer dielectric pulse compressor gratings by the Piranha solution

被引：10

作者：

Chen, Shangbi ^{[1
]}

Sheng, Bin ^{[1
]}

Xu, Xiangdong ^{[1
]}

Fu, Shaojun ^{[1
]}

机构：

[1] Univ Sci & Technol China, Natl Synchrotron Radiat Lab, Hefei 230029, Peoples R China

来源：

5TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: ADVANCED OPTICAL MANUFACTURING TECHNOLOGIES | 2010年 / 7655卷

关键词：

contaminants; LIDT; Piranha solution; PCG; XPS;

D O I：

10.1117/12.866204

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Contaminants are deemed to be the initial source of optical-damage mechanisms as well as the main reason to decrease the Laser Induced Damage Threshold (LIDT) of multilayer dielectric pulse compressor gratings (PCG). In this paper, the Piranha solution was used effectively and nondestructively to remove the residual contaminants on the surface of PCG. The surface cleanliness was evaluated by Scanning Electron Microscopy (SEM) and X-ray Photoelectron Spectroscopy (XPS). The higher removal efficiency was achieved with more times of multiple-cleaning by fresh Piranha solution which has an effectiveness for a given period of time.

引用

页数：7

共 7 条

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