Fabrication of Transparent Conductive Al-doped ZnO Thin Films by Aerosol-assisted Chemical Vapour Deposition

被引：10

作者：

Qin Xiu-Juan ^{[1
,2
]}

Han Si-Hui-Zhi ^{[1
]}

Zhao Lin ^{[1
]}

Zuo Hua-Tong ^{[1
]}

Song Shi-Tao ^{[3
]}

机构：

[1] Yanshan Univ, Coll Environm & Chem Engn, Qinhuangdao 066004, Peoples R China

[2] State Key Lab Metastable Mat Sci & Technol, Qinhuangdao 066004, Peoples R China

[3] Hebei Normal Univ Sci & Technol, Coll Phys & Chem, Qinhuangdao 066004, Peoples R China

来源：

JOURNAL OF INORGANIC MATERIALS | 2011年 / 26卷 / 06期

关键词：

aerosol; chemical vapour deposition; Al-doped ZnO; transparent conductive thin films; OPTICAL-PROPERTIES;

D O I：

10.3724/SP.J.1077.2011.00607

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Al-doped ZnO thin films were prepared by aerosol-assisted chemical vapour deposition (AACVD) on glass substrates. The effect of Al content (2at%-8at%) on the structural, optical and electrical properties of Al-doped ZnO thin films was investigated in detail. The samples were tested by XRD, SEM, EDAX and UV-Vis spectrophotometer. The results indicate that the AZO films have a hexagonal (wurtzite) structure without preferential orientation along c-axis, and however no Al related phases are observed. The average transmittances of the AZO film is over 72% in the visible regions. The optical band gap for the AZO films becomes narrow with the increasing Al dopant. The four-point probe technique is used to characterize thin films electrically. The data shows that Al dopant decrease the sheet resistance. The ZnO films doped with 6at% Al exhibit a minimum of sheet resistance (18 Omega/square).

引用

页码：607 / 612

页数：6