Thermoelectric flow sensors with monolithically integrated channel structures for measurements of very small flow rates

被引：6

作者：

Buchner, Rainer ^{[1
]}

Bhargava, Preety ^{[1
]}

Sosna, Christoph ^{[1
]}

Benecke, Wolfgang ^{[1
]}

Lang, Walter ^{[1
]}

机构：

[1] Univ Bremen, Microsyst Ctr Bremen, Inst Microsensors Actuators & Syst, Bremen, Germany

来源：

2007 IEEE SENSORS, VOLS 1-3 | 2007年

关键词：

D O I：

10.1109/ICSENS.2007.4388529

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

A thermal flow sensor with monolithically integrated channel structures for measurements. of flow rates down to 40nlmin(-1) is presented. The sensor is based on a fabrication process using a high-temperature silicon nitride as protective coating. The channel is realised by means of surface micromachining and consists of SU-8. For chemical stability and to gain hydrophilic properties, the channel is coated on the inside by silicon-oxide and silicon-nitride as a moisture barrier. Sensor systems have been fabricated and characterised.

引用

页码：828 / 831

页数：4

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