Noise-Analysis-Based Model of Filamentary Switching ReRAM With ZrOx/HfOx Stacks

被引:33
作者
Lee, Daeseok [1 ]
Lee, Joonmyoung [1 ]
Jo, Minseok [1 ]
Park, Jubong [1 ]
Siddik, Manzar [1 ]
Hwang, Hyunsang [1 ,2 ]
机构
[1] Gwangju Inst Sci & Technol, Sch Mat Sci & Engn, Kwangju 500712, South Korea
[2] Gwangju Inst Sci & Technol, Sch Nanobio Mat & Elect, Kwangju 500712, South Korea
关键词
Low-frequency noise; resistive random access memory (ReRAM); resistive memory; RANDOM TELEGRAPH NOISE; 1/F NOISE; TRAPS; HFO2;
D O I
10.1109/LED.2011.2148689
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this letter, we propose a model based on noise analysis for the filamentary switching mechanism in resistance random access memory having ZrOx/HfOx bilayer stacks. From the noise analysis results, we concluded that the current flowing during high-resistance state can be described as a trap-assisted current that flows through traps. It has been hypothesized that these traps are the cause of the instability of device parameters. To validate this, the noise analysis results of large-area devices were compared with those of small-area devices. As a consequence, we improved the uniformity of device parameters.
引用
收藏
页码:964 / 966
页数:3
相关论文
共 20 条
[1]   Highly scalable non-volatile resistive memory using simple binary oxide driven by asymmetric unipolar voltage pulses [J].
Baek, IG ;
Lee, MS ;
Seo, S ;
Lee, MJ ;
Seo, DH ;
Suh, DS ;
Park, JC ;
Park, SO ;
Kim, HS ;
Yoo, IK ;
Chung, UI ;
Moon, JT .
IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2004, TECHNICAL DIGEST, 2004, :587-590
[2]   Mechanism of electron trapping and characteristics of traps in HfO2 gate stacks [J].
Bersuker, Gennadi ;
Sim, J. H. ;
Park, Chang Seo ;
Young, Chadwin D. ;
Nadkarni, Suvid V. ;
Choi, Rino ;
Lee, Byoung Hun .
IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, 2007, 7 (01) :138-145
[3]   Oxide Nanoelectronics on Demand [J].
Cen, Cheng ;
Thiel, Stefan ;
Mannhart, Jochen ;
Levy, Jeremy .
SCIENCE, 2009, 323 (5917) :1026-1030
[4]   1/F NOISE AND RADIATION EFFECTS IN MOS DEVICES [J].
FLEETWOOD, DM ;
MEISENHEIMER, TL ;
SCHOFIELD, JH .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1994, 41 (11) :1953-1964
[5]   Unified model of hole trapping, 1/f noise, and thermally stimulated current in MOS devices [J].
Fleetwood, DM ;
Xiong, HD ;
Lu, ZY ;
Nicklaw, CJ ;
Felix, JA ;
Schrimpf, RD ;
Pantelides, ST .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2002, 49 (06) :2674-2683
[6]   Electrical noise and RTS fluctuations in advanced CMOS devices [J].
Ghibaudo, G ;
Boutchacha, T .
MICROELECTRONICS RELIABILITY, 2002, 42 (4-5) :573-582
[7]   Resistance-dependent amplitude of random telegraph-signal noise in resistive switching memories [J].
Ielmini, Daniele ;
Nardi, Federico ;
Cagli, Carlo .
APPLIED PHYSICS LETTERS, 2010, 96 (05)
[8]   Electron spin resonance observation of trapped electron centers in atomic-layer-deposited hafnium oxide on Si [J].
Kang, AY ;
Lenahan, PM ;
Conley, JF .
APPLIED PHYSICS LETTERS, 2003, 83 (16) :3407-3409
[9]   Effect of ZrOx/HfOx bilayer structure on switching uniformity and reliability in nonvolatile memory applications [J].
Lee, Joonmyoung ;
Bourim, El Mostafa ;
Lee, Wootae ;
Park, Jubong ;
Jo, Minseok ;
Jung, Seungjae ;
Shin, Jungho ;
Hwang, Hyunsang .
APPLIED PHYSICS LETTERS, 2010, 97 (17)
[10]   Conduction and Low-Frequency Noise Analysis in Al/α-TiOX/Al Bipolar Switching Resistance Random Access Memory Devices [J].
Lee, Jung-Kyu ;
Jeong, Hu Young ;
Cho, In-Tak ;
Lee, Jeong Yong ;
Choi, Sung-Yool ;
Kwon, Hyuck-In ;
Lee, Jong-Ho .
IEEE ELECTRON DEVICE LETTERS, 2010, 31 (06) :603-605