Effects of He gas addition on the production of active particles in rf magnetron sputtering

被引：10

作者：

Harada, K

Kishida, S

Matsuoka, T

Maruyama, T

Tokutaka, H

Fujimura, K

Koyanagi, T

Fujii, T

机构：

[1] YAMAGUCHI UNIV,FAC ENGN,UBE,YAMAGUCHI 755,JAPAN

[2] KANSAI RES INST,SHIMOGYO KU,KYOTO 600,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1996年 / 35卷 / 6A期

关键词：

high T-c; BSCCO; thin film; He gas; rf magnetron sputtering; Penning process; optical emission spectroscopy; X-ray photoelectron spectroscopy;

D O I：

10.1143/JJAP.35.3590

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We measured optical emission spectra during the deposition of Bi2Sr2Can-1CunOx (BSCCO) films by an rf magnetron sputtering method with a BSCCO powder target. It was shown that the active particles produced are ionized oxygen molecules and CuO radicals when He + O-2 is used as a sputtering gas. The results of X-ray photoelectron spectroscopy indicated that the BSCCO films prepared using He gas have the same metal composition as the target. In addition, we confirmed that the use of He as a sputtering gas enhances the oxidation in the preparation of CuO films.

引用

页码：3590 / 3594

页数：5

共 10 条

[1] SUPERCONDUCTIVITY IN THE BI-SR-CU-O SYSTEM [J].

AKIMITSU, J ;

YAMAZAKI, A ;

SAWA, H ;

FUJIKI, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (12) :L2080-L2081

[2] EMISSION-SPECTRA FROM ARF LASER ABLATION OF HIGH-TC SUPERCONDUCTOR BI2CASR2CU2O9 [J].

DESHMUKH, S ;

ROTHE, EW ;

RECK, GP ;

KUSHIDA, T ;

XU, ZG .

APPLIED PHYSICS LETTERS, 1988, 53 (26) :2698-2700

[3] PREPARATION OF CU-O FILMS BY SPUTTERING USING HE GAS [J].

FUJII, T ;

KOYANAGI, T ;

MOROFUJI, K ;

KASHIMA, T ;

MATSUBARA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (7B) :4482-4485

[4] STABLE GLOW PLASMA AT ATMOSPHERIC-PRESSURE [J].

KANAZAWA, S ;

KOGOMA, M ;

MORIWAKI, T ;

OKAZAKI, S .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1988, 21 (05) :838-840

[5] OPTICAL PLASMA MONITORING OF Y-BA-CU-O RF SPUTTER TARGET TRANSIENTS [J].

KLEIN, JD ;

YEN, A .

APPLIED PHYSICS LETTERS, 1989, 55 (25) :2670-2672

[6]

MAEDA H, 1988, JPN J APPL PHYS PT 2, V27, P1209

[7] A NEW HIGH-TEMPERATURE SUPERCONDUCTOR - BI2SR3-XCAXCU2O8+Y [J].

SUBRAMANIAN, MA ;

TORARDI, CC ;

CALABRESE, JC ;

GOPALAKRISHNAN, J ;

MORRISSEY, KJ ;

ASKEW, TR ;

FLIPPEN, RB ;

CHOWDHRY, U ;

SLEIGHT, AW .

SCIENCE, 1988, 239 (4843) :1015-1017

[8]

TRASCON JM, 1988, PHYS REV B, V37, P9832

[9] OPTICAL SPECTROSCOPY - AN INSITU DIAGNOSTIC FOR PULSED LASER DEPOSITION OF HIGH-TC SUPERCONDUCTING THIN-FILMS [J].

WU, XD ;

DUTTA, B ;

HEGDE, MS ;

INAM, A ;

VENKATESAN, T ;

CHASE, EW ;

CHANG, CC ;

HOWARD, R .

APPLIED PHYSICS LETTERS, 1989, 54 (02) :179-181

[10] OPTICAL SPECTROSCOPIC STUDY OF INVERTED CYLINDRICAL MAGNETRON SPUTTERING OF YBA2CU3O7-X [J].

XI, XX ;

WU, XD ;

INAM, A ;

LI, Q ;

HEMMICK, D ;

FINDIKOGLU, A ;

VENKATESAN, T ;

CHANG, CC ;

HOWARD, R .

APPLIED PHYSICS LETTERS, 1990, 57 (01) :96-98

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