Selective metallization of internal walls of hollow structures inside glass using femtosecond laser

被引:19
作者
Sugioka, K
Hongo, T
Takai, H
Midorikawa, K
机构
[1] RIKEN, Inst Phys & Chem Res, Wako, Saitama 3510198, Japan
[2] Tokyo Denki Univ, Dept Elect Engn, Chiyoda Ku, Tokyo 1018457, Japan
关键词
D O I
10.1063/1.1921355
中图分类号
O59 [应用物理学];
学科分类号
摘要
The selective metallization of glass is demonstrated by femtosecond laser direct writing in an electroless plating solution. The multiphoton absorption of a femtosecond laser by transparent glass makes it possible to selectively deposit copper thin films on the internal walls of hollow microstructures fabricated inside the glass. We regard the mechanism of this process as the reducing reaction of metal ions in the electroless plating solution by the free electrons generated in the glass by the multiphoton absorption of the femtosecond laser. (c) 2005 American Institute of Physics.
引用
收藏
页码:1 / 3
页数:3
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