Micro-Machined Optical Fiber Side-Cantilevers for Acceleration Measurement

被引：26

作者：

Li, J. ^{[1
]}

Wang, G. Y. ^{[1
]}

Sun, J. N. ^{[2
]}

Maier, R. R. J. ^{[2
]}

Macpherson, W. N. ^{[2
]}

Hand, D. P. ^{[2
]}

Dong, F. Z. ^{[1
]}

机构：

[1] Chinese Acad Sci, Anhui Inst Opt & Fine Mech, Hefei 230031, Anhui, Peoples R China

[2] Heriot Watt Univ, Sch Engn & Phys Sci, Edinburgh EH14 4AS, Midlothian, Scotland

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2017年 / 29卷 / 21期

基金：

英国工程与自然科学研究理事会;

关键词：

Optical fabrication; fiber optics sensors; Fabry-Perot; FABRY-PEROT CAVITIES; SENSING APPLICATIONS; TOP CANTILEVERS; ACCELEROMETER; DESIGN; TEMPERATURE; FABRICATION; PRESSURE; SENSORS; SYSTEMS;

D O I：

10.1109/LPT.2017.2753279

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We propose an accelerometer based on a micro-cantilever fabricated onto the side of a single mode optical fiber using a combination of ps-laser machining and focused ion beam (FIB) processing. FIB machining is also used to fabricate a 45 degrees mirror onto the end of the fiber that is accurately aligned with optical fiber core. This provides a reliable means to optically address components attached to the side of the fiber, such as the cantilever. Using interferometry to accurately monitor the deflection of the side cantilever results in a device that is capable of measuring two-axis acceleration. Acceleration up to 6 g is measured with a resolution of similar to 0.01 g and a frequency range from dc to 500 Hz has been demonstrated. The cross-axis sensitivity is below -32 dB.

引用

页码：1836 / 1839

页数：4

共 26 条

[1] Simultaneous measurement of temperature and refractive index using focused ion beam milled Fabry-Perot cavities in optical fiber micro-tips [J].

Andre, Ricardo M. ;

Warren-Smith, Stephen C. ;

Becker, Martin ;

Dellith, Jan ;

Rothhardt, Manfred ;

Zibaii, M. I. ;

Latifi, H. ;

Marques, Manuel B. ;

Bartelt, Hartmut ;

Frazao, Orlando .

OPTICS EXPRESS, 2016, 24 (13) :14053-14065

[2] Focused ion beam post-processing of optical fiber Fabry-Perot cavities for sensing applications [J].

Andre, Ricardo M. ;

Pevec, Simon ;

Becker, Martin ;

Dellith, Jan ;

Rothhardt, Manfred ;

Marques, Manuel B. ;

Donlagic, Denis ;

Bartelt, Hartmut ;

Frazao, Orlando .

OPTICS EXPRESS, 2014, 22 (11) :13102-13108

[3] Mechanical design of a single-axis monolithic accelerometer for advanced seismic attenuation systems [J].

Bertolini, A ;

DeSalvo, R ;

Fidecaro, F ;

Francesconi, M ;

Marka, S ;

Sannibale, V ;

Simonetti, D ;

Takamori, A ;

Tariq, H .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2006, 556 (02) :616-623

[4] Collecting optical coherence elastography depth profiles with a micromachined cantilever probe [J].

Chavan, Dhwajal ;

Mo, Jianhua ;

de Groot, Mattijs ;

Meijering, Anna ;

de Boer, Johannes F. ;

Iannuzzi, Davide .

OPTICS LETTERS, 2013, 38 (09) :1476-1478

[5] Numerical study of a ferrule-top cantilever optical fiber sensor for wind-tunnel applications and comparison with experimental results [J].

Cipullo, A. ;

Gruca, G. ;

Heeck, K. ;

De Filippis, F. ;

Iannuzzi, D. ;

Minardo, A. ;

Zeni, L. .

SENSORS AND ACTUATORS A-PHYSICAL, 2012, 178 :17-25

[6] Two-axis temperature-insensitive accelerometer based on multicore fiber Bragg gratings [J].

Fender, Amanda ;

MacPherson, William N. ;

Maier, Robert R. J. ;

Barton, James S. ;

George, David S. ;

Howden, Robert I. ;

Smith, Graham W. ;

Jones, Benjamin J. S. ;

McCulloch, Scott ;

Chen, Xianfeng ;

Suo, Rui ;

Zhang, Lin ;

Bennion, Ian .

IEEE SENSORS JOURNAL, 2008, 8 (7-8) :1292-1298

[7] Top-down approach to fiber-top cantilevers [J].

Gavan, Khashayar Babaei ;

Rector, Jan H. ;

Heeck, Kier ;

Chavan, Dhwajal ;

Gruca, Grzegorz ;

Oosterkamp, Tjerk H. ;

Iannuzzi, Davide .

OPTICS LETTERS, 2011, 36 (15) :2898-2900

[8] Demonstration of an optically actuated ferrule-top device for pressure and humidity sensing [J].

Gruca, G. ;

Chavan, D. ;

Rector, J. ;

Heeck, K. ;

Iannuzzi, D. .

SENSORS AND ACTUATORS A-PHYSICAL, 2013, 190 :77-83

[9] Fiber-top atomic force microscope [J].

Iannuzzi, D. ;

Deladi, S. ;

Berenschot, J. W. ;

de Man, S. ;

Heeck, K. ;

Elwenspoek, M. C. .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2006, 77 (10)

[10] Fibre-top cantilevers: design, fabrication and applications [J].

Iannuzzi, D. ;

Heeck, K. ;

Slaman, M. ;

de Man, S. ;

Rector, J. H. ;

Schreuders, H. ;

Berenschot, J. W. ;

Gadgil, V. J. ;

Sanders, R. G. P. ;

Elwenspoek, M. C. ;

Deladi, S. .

MEASUREMENT SCIENCE AND TECHNOLOGY, 2007, 18 (10) :3247-3252

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