共 38 条
[3]
[Anonymous], 2015, A. C20-00, P1, DOI [DOI 10.1520/C0143, 10.1520/C0143_C0143M-20, DOI 10.1520/C0020-00R10.2,00]
[4]
Growth and characterization of TiAlN/CrAlN superlattices prepared by reactive direct current magnetron sputtering
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
2009, 27 (01)
:29-36