共 35 条
- [21] Electron emission yield and charging process of alkali-silicate glass submitted to an electron beam under the varying temperature condition NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2012, 270 : 120 - 127
- [22] Modelling and observations of electron beam charging of an insulator/metal bilayer and its impact on secondary electron images in defect inspection equipment JOURNAL OF ELECTRON MICROSCOPY, 2010, 59 : S189 - S193
- [24] Influence of ion implantation and electron pre-irradiation on charging of dielectrics under electron beam irradiation: Application to SiO2 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2019, 460 : 141 - 146
- [28] Helium ion beam induced electron emission from insulating silicon nitride films under charging conditions NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2018, 425 : 11 - 17
- [30] Electron beam charging of a SiO2 layer on Si: a comparison between Monte Carlo-simulated and experimental results LITHOGRAPHY ASIA 2008, 2008, 7140