Low-cost self-cleaning room temperature SnO2 thin film gas sensor on polymer nanostructures

被引:2
作者
Huo, Haibin
Yan, Fadong
Wang, Cong
Ren, Haizhou
Shen, Mengyan [1 ]
机构
[1] Univ Massachusetts Lowell, Dept Phys & Appl Phys, 1 Univ Ave, Lowell, MA 01854 USA
来源
SENSORS AND SMART STRUCTURES TECHNOLOGIES FOR CIVIL, MECHANICAL, AND AEROSPACE SYSTEMS 2010 | 2010年 / 7647卷
基金
美国国家科学基金会;
关键词
thin film sensor; tin oxide; CO gas; nanospike; soft nanolithography; self-cleaning; FEMTOSECOND LASER IRRADIATION; REGULAR ARRAYS; SILICON;
D O I
10.1117/12.847260
中图分类号
V [航空、航天];
学科分类号
08 ; 0825 ;
摘要
We have successfully fabricated SnO2 thin film CO gas sensors on nanospiked polyurethane (PU) polymer surfaces that are replicated with a low-cost soft nanolithography method from nanospiked silicon surfaces formed with femtosecond laser irradiations. The sensors show sensitive responses to the CO gas at room temperature because of the sharp structures of the nanospikes. This is much different from the sensors of SnO2 thin film coated on smooth surfaces that show no response to the CO gas at room temperature. To make the nanostructure sensor surface behave self-cleaning like lotus leaves, we deposited a silane monolayer on the surface of the sensors with the 1H,1H,2H,2H-perfluorooctyltrichlorosilane (PFOTS) which has low surface energy. The contact angle measurement conducted on the PFOTS monolayer-coated SnO2 gas sensors indicates that a super-hydrophobic surface formed on the nanospike sensor. The CO gas response sensitivity of the PFOTS-coated SnO2 sensors is almost the same to that of the as-fabricated SnO2 sensors without the PFOTS coating. Such a super-hydrophobic surface can protect the sensors exposed to moisture and heavy particulates, and can perform cleaning-in-place operations to prolong the lifetime of the sensors. These results show a great potential to fabricate thousands of identical gas sensors at low cost.
引用
收藏
页数:8
相关论文
共 50 条
  • [1] Room Temperature SnO2 Thin Film Gas Sensor Fabricated on Si Nanospikes
    Huo, H. B.
    Wang, C.
    Yan, F. D.
    Ren, H. Z.
    Shen, M. Y.
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2009, 9 (08) : 4817 - 4819
  • [2] Modification of coral-like SnO2 nanostructures with dense TiO2 nanoparticles for a self-cleaning gas sensor
    Wan, Yuteng
    Liu, Jinyun
    Fu, Xiangqian
    Zhang, Xiaoman
    Meng, Fanli
    Yu, Xinyao
    Jin, Zhen
    Kong, Lingtao
    Liu, Jinhuai
    TALANTA, 2012, 99 : 394 - 403
  • [3] Failure study of SnO2 room temperature gas sensors fabricated on nanospike substrates
    Wang, Pengtao
    Ren, Haizhou
    Huo, Haibin
    Shen, Mengyan
    Sun, Hongwei
    Ruths, Marina
    SENSORS AND SMART STRUCTURES TECHNOLOGIES FOR CIVIL, MECHANICAL, AND AEROSPACE SYSTEMS 2012, PTS 1 AND 2, 2012, 8345
  • [4] A self-cleaning, room-temperature titania-nanotube hydrogen gas sensor
    Mor, GK
    Varghese, OK
    Paulose, M
    Grimes, CA
    SENSOR LETTERS, 2003, 1 (01) : 42 - 46
  • [5] Superhydrophilicity of photocatalytic ZnO/SnO2 heterostructure for self-cleaning applications
    Diliraj Talinungsang
    Pankaj Upadhaya
    Debarun Dhar Kumar
    Journal of Sol-Gel Science and Technology, 2019, 92 : 575 - 584
  • [6] Superhydrophilicity of photocatalytic ZnO/SnO2 heterostructure for self-cleaning applications
    Talinungsang
    Upadhaya, Diliraj
    Kumar, Pankaj
    Purkayastha, Debarun Dhar
    JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2019, 92 (03) : 575 - 584
  • [7] SnO2/Pt Thin Film Laser Ablated Gas Sensor Array
    Abadi, Mohammad Hadi Shahrokh
    Hamidon, Mohd Nizar
    Shaari, Abdul Halim
    Abdullah, Norhafizah
    Wagiran, Rahman
    SENSORS, 2011, 11 (08): : 7724 - 7735
  • [8] Low Temperature Tin Oxide (SnO2) Nanowire Gas Sensor
    Johari, Anima
    Bhatnagar, M. C.
    Rana, Vikas
    16TH INTERNATIONAL WORKSHOP ON PHYSICS OF SEMICONDUCTOR DEVICES, 2012, 8549
  • [9] A comparative study of SnO2 and SnO2:Cu thin films for gas sensor applications
    Kissine, VV
    Voroshilov, SA
    Sysoev, VV
    THIN SOLID FILMS, 1999, 348 (1-2) : 304 - 311
  • [10] Improved Efficiency of Solar Cell using Silane based SnO2 Thin Films with Self-Cleaning and Antifogging Properties
    Chandralekha, N. R.
    Shanthi, J.
    Antonette, L. Cathelene
    Anoop, K. K.
    SILICON, 2024, 16 (12) : 5121 - 5134