Fabrication of free-standing porous silicon microstructures

被引：8
|
作者：
Garel, O. [1 ]
Breluzeau, C.
Dufour-Gergam, E.
Bosseboeuf, A.
Belier, B.
Mathet, V.
Verjus, F.
机构：
[1] Univ Paris 11, IEF, UMR 8622, F-91405 Orsay, France
[2] CNRS, F-91405 Orsay, France
[3] NXP, Caen, France
来源：
JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2007年 / 17卷 / 07期
关键词：
Cantilever beams - Chemical sensors - Electromechanical devices - Resonance;
D O I：
10.1088/0960-1317/17/7/S13
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The high specific surface of porous silicon and its high reactivity makes this material a good candidate for chemical sensors based on electrical or electromechanical devices. In this paper, several processes are presented to realize free-standing porous silicon microstructures (membranes and cantilever beams). Good resonance quality factors were measured (Q = 110 and 760 respectively) demonstrating that porous silicon is a suitable material for resonant chemical sensors.
引用
收藏
页码：S164 / S167
页数：4
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