Fabrication of free-standing porous silicon microstructures

被引：8
|
作者：
Garel, O. [1 ]
Breluzeau, C.
Dufour-Gergam, E.
Bosseboeuf, A.
Belier, B.
Mathet, V.
Verjus, F.
机构：
[1] Univ Paris 11, IEF, UMR 8622, F-91405 Orsay, France
[2] CNRS, F-91405 Orsay, France
[3] NXP, Caen, France
来源：
JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2007年 / 17卷 / 07期
关键词：
Cantilever beams - Chemical sensors - Electromechanical devices - Resonance;
D O I：
10.1088/0960-1317/17/7/S13
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The high specific surface of porous silicon and its high reactivity makes this material a good candidate for chemical sensors based on electrical or electromechanical devices. In this paper, several processes are presented to realize free-standing porous silicon microstructures (membranes and cantilever beams). Good resonance quality factors were measured (Q = 110 and 760 respectively) demonstrating that porous silicon is a suitable material for resonant chemical sensors.
引用
收藏
页码：S164 / S167
页数：4
相关论文
共 50 条
  • [21] Free-standing silicon shadow masks for transmon qubit fabrication
    Tsioutsios, I.
    Serniak, K.
    Diamond, S.
    Sivak, V. V.
    Wang, Z.
    Shankar, S.
    Frunzio, L.
    Schoelkopf, R. J.
    Devoret, M. H.
    AIP ADVANCES, 2020, 10 (06)
  • [22] Optimized process for fabrication of free-standing silicon nanophotonic devices
    Seidler, Paul
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2017, 35 (03):
  • [23] Free-standing porous silicon single and multiple optical cavities
    Ghulinyan, M
    Oton, CJ
    Bonetti, G
    Gaburro, Z
    Pavesi, L
    JOURNAL OF APPLIED PHYSICS, 2003, 93 (12) : 9724 - 9729
  • [24] Anomalous birefringence of light in free-standing samples of porous silicon
    Kompan, ME
    Salonen, J
    Shabanov, IY
    JOURNAL OF EXPERIMENTAL AND THEORETICAL PHYSICS, 2000, 90 (02) : 324 - 329
  • [25] Transient voltage behavior of free-standing porous silicon layers
    Pennelli, G
    JOURNAL OF APPLIED PHYSICS, 1996, 80 (09) : 5116 - 5120
  • [26] Nonlinear optical refraction of free-standing porous silicon layers
    Lettieri, S.
    Fiore, O.
    Maddalena, P.
    Ninno, D.
    Di Francia, G.
    La Ferrara, V.
    Optics Communications, 1999, 168 (05): : 383 - 391
  • [27] Nonlinear optical refraction of free-standing porous silicon layers
    Lettieri, S
    Fiore, O
    Maddalena, P
    Ninno, D
    Di Francia, G
    La Ferrara, V
    OPTICS COMMUNICATIONS, 1999, 168 (5-6) : 383 - 391
  • [28] Anomalous birefringence of light in free-standing samples of porous silicon
    M. E. Kompan
    J. Salonen
    I. Yu. Shabanov
    Journal of Experimental and Theoretical Physics, 2000, 90 : 324 - 329
  • [29] Evidence of anisotropic structures of free-standing porous silicon films
    Technical Univ Chemnitz-Zwickau, Chemnitz, Germany
    Thin Solid Films, 1-2 (79-83):
  • [30] Evidence of anisotropic structures of free-standing porous silicon films
    Bruska, A
    Astrova, EV
    Falke, U
    Raschke, T
    Radehaus, C
    Hietschold, M
    THIN SOLID FILMS, 1997, 297 (1-2) : 79 - 83
12345