2016 13TH INTERNATIONAL CONFERENCE ON ELECTRICAL ENGINEERING, COMPUTING SCIENCE AND AUTOMATIC CONTROL (CCE)
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2016年
关键词:
Thin film transistors;
oxide semiconductors;
IGZO TFTs;
modeling with temperature;
D O I:
暂无
中图分类号:
TP [自动化技术、计算机技术];
学科分类号:
0812 ;
摘要:
Amorphous oxide semiconductor thin film transistors (AOSTFTs) with SiO2 and Indium-Gallium-Zinc-Oxides (IGZO) as dielectric and semiconductor layers respectively, are characterized in the temperature range between 300 and 400 K. The behavior of the threshold voltage, mobility factor and saturation coefficient is analyzed as function of temperature. It is shown that, using the Unified Model and Extracted Method (UMEM), the output characteristics of the devices in the linear region can be well modeled at different temperatures. This is done determining the extracted model parameters at 300 K and taking into account the law of variation with temperature for each parameter, corresponding to the specific fabrication technology of the devices. In the saturation region, an abnormal reduction of the drain current is observed. This effect has to be further studied and the representation of its behavior incorporated to the model.
机构:
Canon Inc, Canon Res Ctr, Ohta Ku, Tokyo 1468501, JapanCanon Inc, Canon Res Ctr, Ohta Ku, Tokyo 1468501, Japan
Kumomi, Hideya
Nomura, Kenji
论文数: 0引用数: 0
h-index: 0
机构:
Tokyo Inst Technol, Mat & Struct Lab, Midori Ku, Yokohama, Kanagawa 2268503, JapanCanon Inc, Canon Res Ctr, Ohta Ku, Tokyo 1468501, Japan
Nomura, Kenji
Kamiya, Toshio
论文数: 0引用数: 0
h-index: 0
机构:
Tokyo Inst Technol, Mat & Struct Lab, Midori Ku, Yokohama, Kanagawa 2268503, JapanCanon Inc, Canon Res Ctr, Ohta Ku, Tokyo 1468501, Japan
Kamiya, Toshio
Hosono, Hideo
论文数: 0引用数: 0
h-index: 0
机构:
Tokyo Inst Technol, Mat & Struct Lab, Midori Ku, Yokohama, Kanagawa 2268503, Japan
Japan Sci & Technol Agcy, ERATO SORST, Tokyo, JapanCanon Inc, Canon Res Ctr, Ohta Ku, Tokyo 1468501, Japan
机构:
Canon Inc, Canon Res Ctr, Ohta Ku, Tokyo 1468501, JapanCanon Inc, Canon Res Ctr, Ohta Ku, Tokyo 1468501, Japan
Kumomi, Hideya
Nomura, Kenji
论文数: 0引用数: 0
h-index: 0
机构:
Tokyo Inst Technol, Mat & Struct Lab, Midori Ku, Yokohama, Kanagawa 2268503, JapanCanon Inc, Canon Res Ctr, Ohta Ku, Tokyo 1468501, Japan
Nomura, Kenji
Kamiya, Toshio
论文数: 0引用数: 0
h-index: 0
机构:
Tokyo Inst Technol, Mat & Struct Lab, Midori Ku, Yokohama, Kanagawa 2268503, JapanCanon Inc, Canon Res Ctr, Ohta Ku, Tokyo 1468501, Japan
Kamiya, Toshio
Hosono, Hideo
论文数: 0引用数: 0
h-index: 0
机构:
Tokyo Inst Technol, Mat & Struct Lab, Midori Ku, Yokohama, Kanagawa 2268503, Japan
Japan Sci & Technol Agcy, ERATO SORST, Tokyo, JapanCanon Inc, Canon Res Ctr, Ohta Ku, Tokyo 1468501, Japan