[1] Fudan Univ, Minist Educ, State Key Lab Surface Phys, Shanghai 200433, Peoples R China
[2] Fudan Univ, Minist Educ, Key Lab Micro & Nano Photon Struct, Shanghai 200433, Peoples R China
[3] Collaborat Innovat Ctr Adv Microstruct, Nanjing 210093, Peoples R China
[4] Fudan Univ, Shanghai Engn Res Ctr Ultraprecis Opt Mfg, Sch Informat Sci & Technol, Dept Opt Sci & Engn, Shanghai 200433, Peoples R China
[5] Fudan Univ, Yiwu Res Inst, Chengbei Rd, Yiwu City 322000, Zhejiang, Peoples R China
[6] Wuhan Univ, Sch Elect Informat, Wuhan 430072, Peoples R China
[7] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, Changchun 130033, Jilin, Peoples R China