共 16 条
[1]
Beer S, 2005, P INT C PHD RES MICR, V1-2, P335
[5]
Static and dynamic characterization of MEMS and MOEMS devices using optical interference microscopy
[J].
MEMS, MOEMS, AND MICROMACHINING,
2004, 5455
:429-435
[8]
Efficient nonlinear algorithm for envelope detection in white light interferometry
[J].
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION,
1996, 13 (04)
:832-843
[10]
Montgomery P. C., 1993, Proceedings of the SPIE - The International Society for Optical Engineering, V1755, P12, DOI 10.1117/12.140772