Towards real time 3D quantitative characterisation of in situ layer growth using white light interference microscopy

被引:10
作者
Montgomery, P. C. [1 ]
Anstotz, F. [1 ]
Montagna, J. [1 ]
Montaner, D. [1 ]
Pramatarova, L.
Pecheva, E.
机构
[1] CNRS, UMR 7163, Inst Elect Solide & Syst InESS, Lab Commun UdS, F-67037 Strasbourg, France
来源
16 ISCMP: PROGRESS IN SOLID STATE AND MOLECULAR ELECTRONICS, IONICS AND PHOTONICS | 2010年 / 253卷
关键词
INTERFEROMETRY; IMAGERY;
D O I
10.1088/1742-6596/253/1/012017
中图分类号
O64 [物理化学(理论化学)、化学物理学]; O56 [分子物理学、原子物理学];
学科分类号
070203 ; 070304 ; 081704 ; 1406 ;
摘要
Quantitative 3D characterisation of layer growth or modification in situ in liquid systems is a challenge because of the changing morphology of the layer and the presence of the growth liquid. Because of the limited bandwidth of many surface profiling techniques, measurement of microscopic surface roughness is generally limited to that of static surfaces. The aim of the present work is to develop a new technique using high speed scanning interference microscopy combined with an adapted immersion head for use in liquid growth systems. For several years we have been developing a real time 3D surface analysis system based on a high speed camera and cabled logic processing, combined with continuous scanning white light interferometry. An optical measurement head is also being developed for use in liquid immersion conditions, with the view of measuring layer growth or modification in biomaterials. In this paper we report on the present status of the development of our second prototype 4D system and also of the optical immersion head for in situ measurements, describing the achievements made and the difficulties still to be overcome.
引用
收藏
页数:10
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