Substrate-Free Chemical Vapor Deposition of Large-Scale III-V Nanowires for High-Performance Transistors and Broad-Spectrum Photodetectors

被引:31
|
作者
Yin, Yanxue [1 ]
Guo, Yanan [1 ]
Liu, Dong [1 ]
Miao, Chengcheng [1 ]
Liu, Fengjing [1 ]
Zhuang, Xinming [1 ]
Tan, Yang [1 ]
Chen, Feng [1 ]
Yang, Zai-xing [1 ]
机构
[1] Shandong Univ, Sch Microelect, State Key Lab Crystal Mat, Sch Phys, Jinan 250100, Peoples R China
基金
中国国家自然科学基金; 国家重点研发计划;
关键词
III-V nanowires; growth substrate; large-scale chemical vapor deposition; field-effect-transistors; photodetectors; INGAAS NANOWIRES; GAN NANOWIRES; GROWTH; MOBILITY; MECHANISM; QUALITY; SILICON;
D O I
10.1002/adom.202102291
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Large-scale growth of high-quality III-V nanowires (NWs) on an expected substrate is challenging the next-generation optoelectronic devices. In this work, high-quality III-V NWs of binary GaSb, GaAs and ternary GaAsxSb1-x, InxGa1-xAs are successfully prepared on the hard substrates of SiO2/Si, amorphous glass and flexible substrates of mica, glass fiber, and carbon cloth by adopting the simple and low-cost metal-catalyzed chemical vapor deposition (CVD) method. The homogeneity of morphology, crystallinity, and stoichiometry is checked by scanning electron microscopy, X-ray diffraction, high-resolution transmission electron microscopy, and energy dispersive X-ray spectroscopy, implying the high-quality phase purity of III-V NWs on various substrates. When configured into NW field-effect-transistors, the electrical properties, such as field-effect mobilities of GaSb NWs grown on various substrates show relatively similar satisfactory values. Meanwhile, the as-fabricated GaSb NWs photodetector exhibits excellent broad-spectrum photodetection ability from visible to near-infrared bands. Furthermore, by adopting a home-made stepper CVD method, large-scale GaSb NWs with uniform morphology, crystallinity, stoichiometry, and electrical properties are prepared on glass. All results guide the easy growth of high-quality functional NWs on any expected substrates for further photoelectronic applications.
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页数:9
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