Tunnel Magnetoresistance Properties of Double MgO-Barrier Magnetic Tunnel Junctions With Different Free-Layer Alloy Compositions and Structures

被引:10
作者
Gan, Huadong [1 ]
Ikeda, Shoji [1 ,2 ]
Yamanouchi, Michihiko [1 ]
Miura, Katsuya [1 ,2 ,3 ]
Mizunuma, Kotaro [2 ]
Hayakawa, Jun [3 ]
Matsukura, Fumihiro [1 ,2 ]
Ohno, Hideo [1 ,2 ]
机构
[1] Tohoku Univ, Ctr Spintron Integrated Syst, Sendai, Miyagi 9808577, Japan
[2] Tohoku Univ, Elect Commun Res Inst, Lab Nanoelect & Spintron, Sendai, Miyagi 9808577, Japan
[3] Hitachi Ltd, Adv Res Lab, Tokyo 1858601, Japan
关键词
MgO barrier; sputtering condition; tunnel magnetoresistance; ROOM-TEMPERATURE; TMR;
D O I
10.1109/TMAG.2010.2104137
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We investigated tunnel magnetoresistance (TMR) properties in double MgO-barrier magnetic tunnel junctions (DMTJs) with (Co25Fe75)(100-x)B-x free-layers with x = 15, 20, and 25 (in at.%) sputtered at different power. The TMR ratio of DMTJs increased with sputtering power, which is ascribed to the B composition reduction in the CoFeB free-layer with increasing sputtering power. The x-ray diffraction measurement showed that crystallization into (001)-oriented texture of CoFeB film sandwiched between the two MgO-layers as well as an improvement of (001) orientation of top MgO-barrier are realized. The TMR ratio over 200% was obtained in DMTJs with a (Co25Fe75)(85)B-15 free-layer sputtered at 0.88 and 1.77 W/cm(2)
引用
收藏
页码:1567 / 1570
页数:4
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