Generation of gas discharge plasma by an arc source with a cold hollow cathode

被引：2
|
作者：
Schanin, PM [1 ]
Koval, NN [1 ]
Akhmadeev, YK [1 ]
机构：
[1] Russian Acad Sci, Siberian Div, Inst High Current Elect, Tomsk 634055, Russia
来源：
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 2005年 / 48卷 / 03期
关键词：
Magnetic Field; Physical Chemistry; Vacuum Chamber; Cathode Material; Discharge Current;
D O I：
10.1007/s10786-005-0059-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The results from a study of an are plasma source with a cold hollow cathode Lire presented. The source generates plasma with a density of similar to 10(10) cm(-3) in a volume of similar to 0.2 m(3) at discharge currents of up to 150 A, an arc discharge operating voltage of 30-40 V, and a low pressure of 0.1-1 Pa, The motion of the cathode spot in the crossed electric and magnetic fields inside the hollow cathode and the cathode's special design make it possible to eliminate almost completely the penetration of the sputtered cathode material into the working vacuum chamber.
引用
收藏
页码：328 / 332
页数：5
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