Ultra high resolution X-ray detectors

被引：0

作者：

Hess, U ^{[1
]}

Bühler, M ^{[1
]}

Von Hentig, R ^{[1
]}

Hertrich, T ^{[1
]}

Phelan, K ^{[1
]}

Wernicke, D ^{[1
]}

Höhne, J ^{[1
]}

机构：

[1] CSP Cryogen Spectrometers GmbH, D-85737 Ismaning, Germany

来源：

CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY 2000, INTERNATIONAL CONFERENCE | 2001年 / 550卷

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

CSP Cryogenic Spectrometers GmbH is developing cryogenic energy dispersive Xray spectrometers based on superconducting detector technology. Superconducting sensors exhibit at least a 10 fold improvement in energy resolution due to their low energy gap compared to conventional Si(Li) or Ge detectors. These capabilities are extremely valuable for the analysis of light elements and in general for the analysis of the low energy range of the Xray spectrum. The spectrometer is based on a mechanical cooler needing no liquid coolants and an adiabatic demagnetization refrigerator (ADR) stage which supplies the operating temperature of below 100 mK for the superconducting sensor. Applications include surface analysis in semiconductor industry as well material analysis for material composition e.g. in ceramics or automobile industry.

引用

页码：568 / 569

页数：2

共 50 条

[31] Proximity correction simulations in ultra-high resolution x-ray lithography
Bourdillon, AJ
Boothroyd, CB
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2001, 34 (22) : 3209 - 3213
[32] Ultra-High Resolution X-Ray CT System with a CdTe Detector
Yoshitake, Junpei
Ogawa, Koichi
2006 IEEE NUCLEAR SCIENCE SYMPOSIUM CONFERENCE RECORD, VOL 1-6, 2006, : 3106 - 3110
[33] A method with ultra-high angular resolution for X-ray diffraction experiments
Zhang, X. M.
Zheng, X.
Li, X. L.
Meng, F. Q.
Yin, S. S.
JOURNAL OF SYNCHROTRON RADIATION, 2024, 31 (Pt 1) : 35 - 41
[34] TWO-DIMENSIONAL HIGH RESOLUTION X-RAY DETECTORS FOR IMAGING AND INTENSITY MEASUREMENTS
Fandrich, F.
Koehler, R.
ACTA CRYSTALLOGRAPHICA A-FOUNDATION AND ADVANCES, 1996, 52 : C26 - C26
[35] High-energy resolution X-ray, gamma and electron spectroscopy with cryogenic detectors
Loidl, M
Leblanc, E
Bouchard, J
Branger, T
Coron, N
Leblanc, J
de Marcillac, P
Rotzinger, H
Daniyarov, T
Linck, M
Fleischmann, A
Enss, C
APPLIED RADIATION AND ISOTOPES, 2004, 60 (2-4) : 363 - 368
[36] High resolution non dispersive x-ray spectroscopy with state of the art silicon detectors
Struder, L
Fiorini, C
Gatti, E
Hartmann, R
Holl, P
Krause, N
Lechner, P
Longoni, A
Lutz, G
Kemmer, J
Meidinger, N
Popp, M
Soltau, H
von Zanthier, C
MIKROCHIMICA ACTA, 1998, : 11 - 19
[37] Metallic magnetic calorimeters (MMC): detectors for high-resolution X-ray spectroscopy
Fleischmann, A
Link, M
Daniyarov, T
Rotzinger, H
Enss, C
Seidel, GM
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2004, 520 (1-3): : 27 - 31
[38] Development of superconducting tunnel junction detectors for high-resolution X-ray spectroscopy
Angloher, G
Beckhoff, B
Bühler, M
von Feilitzsch, F
Hertrich, T
Hettl, P
Höhne, J
Huber, M
Jochum, J
Mössbauer, RL
Schnagl, J
Scholze, F
Ulm, G
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2000, 444 (1-2): : 214 - 219
[39] Characterization and imaging performance of nanoscintillator screen for high resolution X-ray imaging detectors
Cha, Bo Kyung
Lee, Seung Jun
Muralidharan, P.
Kim, Jon Yul
Kim, Do Kyung
Cho, Gyuseong
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2011, 633 : S294 - S296
[40] A high spectral resolution observation of the soft X-ray diffuse background with thermal detectors
McCammon, D
Almy, R
Apodaca, E
Tiest, WB
Cui, W
Deiker, S
Galeazzi, M
Juda, M
Lesser, A
Mihara, T
Morgenthaler, JP
Sanders, WT
Zhang, J
Figueroa-Feliciano, E
Kelley, RL
Moseley, SH
Mushotzky, RF
Porter, FS
Stahle, CK
Szymkowiak, AE
ASTROPHYSICAL JOURNAL, 2002, 576 (01): : 188 - 203

← 1 2 3 4 5 →