Ultra high resolution X-ray detectors

被引：0
|
作者：
Hess, U [1 ]
Bühler, M [1 ]
Von Hentig, R [1 ]
Hertrich, T [1 ]
Phelan, K [1 ]
Wernicke, D [1 ]
Höhne, J [1 ]
机构：
[1] CSP Cryogen Spectrometers GmbH, D-85737 Ismaning, Germany
来源：
CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY 2000, INTERNATIONAL CONFERENCE | 2001年 / 550卷
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
CSP Cryogenic Spectrometers GmbH is developing cryogenic energy dispersive Xray spectrometers based on superconducting detector technology. Superconducting sensors exhibit at least a 10 fold improvement in energy resolution due to their low energy gap compared to conventional Si(Li) or Ge detectors. These capabilities are extremely valuable for the analysis of light elements and in general for the analysis of the low energy range of the Xray spectrum. The spectrometer is based on a mechanical cooler needing no liquid coolants and an adiabatic demagnetization refrigerator (ADR) stage which supplies the operating temperature of below 100 mK for the superconducting sensor. Applications include surface analysis in semiconductor industry as well material analysis for material composition e.g. in ceramics or automobile industry.
引用
收藏
页码：568 / 569
页数：2
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