共 28 条
[1]
BERHANE S, 1993, MATER RES SOC SYMP P, V298, P99, DOI 10.1557/PROC-298-99
[2]
BLEY RA, 1994, MATER RES SOC SYMP P, V351, P275, DOI 10.1557/PROC-351-275
[8]
FUCHS HD, 1992, MATER RES SOC SYMP P, V256, P159
[9]
HYDROGEN DESORPTION-KINETICS FROM MONOHYDRIDE AND DIHYDRIDE SPECIES ON SILICON SURFACES
[J].
PHYSICAL REVIEW B,
1988, 37 (14)
:8234-8243
[10]
HAMILTON B, 1995, SEMICONDUCT SCI TECH, V10, P1197