Mobility of positive ions in CF4

被引：15
|
作者：
Stojanovic, V. [1 ]
Raspopovic, Z. [1 ]
Jovanovic, J. V. [2 ]
de Urquijo, J. [3 ]
Petrovic, Z. Lj [1 ]
机构：
[1] Univ Belgrade, Inst Phys, Belgrade 11080, Serbia
[2] Univ Belgrade, Fac Mech Engn, Belgrade 11000, Serbia
[3] Univ Nacl Autonoma Mexico, Ctr Ciencias Fis, Cuernavaca 62251, Morelos, Mexico
来源：
18TH INTERNATIONAL SUMMER SCHOOL ON VACUUM, ELECTRON AND ION TECHNOLOGIES (VEIT2013) | 2014年 / 514卷
关键词：
DISCHARGE; TRANSPORT; GASES; SIMULATION;
D O I：
10.1088/1742-6596/514/1/012059
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Cross-section sets for transport of positive ions in CF4 that fit the available experimental data for mobility are assessed by normalizing the available experimental and theoretical cross-sections within the framework of the swarm method. Transport parameters for positive ions in CF4 in DC fields at a gas temperature of T = 300 K are calculated as a function of the reduced electric fields E/N (N being the gas density) by using Monte Carlo simulation.
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收藏
页数：5
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