Destruction of Solid C60F18 by Electron Beam

被引：0

作者：

Shnitov, V. V. ^{[1
]}

Mikoushkin, V. M. ^{[1
]}

Gordeev, Yu. S. ^{[1
]}

Boltalina, O. V. ^{[2
]}

Goldt, I. V. ^{[3
]}

机构：

[1] Ioffe Phys Tech Inst RAS, St Petersburg 194021, Russia

[2] Colorado State Univ, Dept Chem, Ft Collins, CO 80523 USA

[3] Moscow MV Lomonosov State Univ, Dept Chem, Moscow, Russia

来源：

FULLERENES NANOTUBES AND CARBON NANOSTRUCTURES | 2010年 / 18卷 / 4-6期

关键词：

Destruction; Electron energy loss spectroscopy; Fluorinated fullerite C60F18; C-60; FULLERITE; EXCITATIONS;

D O I：

10.1080/1536383X.2010.489339

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

An extremely high rate of destruction of fluorinated fullerite C60F18 by accelerated electrons was revealed. This rate was three orders of magnitude higher than that of the ordinary fullerite C-60. High rate of the modification was assumed to be caused by the efficient mechanism of fragmentation of C60F18 molecule compared to the mechanism of polymerization of fullerite C-60. The conclusion has been made that films of fluorinated fullerites are perspective as an electron-beam resist for dry nanolithography.

引用

页码：446 / 449

页数：4