Destruction of Solid C60F18 by Electron Beam

被引：0
|
作者：
Shnitov, V. V. [1 ]
Mikoushkin, V. M. [1 ]
Gordeev, Yu. S. [1 ]
Boltalina, O. V. [2 ]
Goldt, I. V. [3 ]
机构：
[1] Ioffe Phys Tech Inst RAS, St Petersburg 194021, Russia
[2] Colorado State Univ, Dept Chem, Ft Collins, CO 80523 USA
[3] Moscow MV Lomonosov State Univ, Dept Chem, Moscow, Russia
来源：
FULLERENES NANOTUBES AND CARBON NANOSTRUCTURES | 2010年 / 18卷 / 4-6期
关键词：
Destruction; Electron energy loss spectroscopy; Fluorinated fullerite C60F18; C-60; FULLERITE; EXCITATIONS;
D O I：
10.1080/1536383X.2010.489339
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
An extremely high rate of destruction of fluorinated fullerite C60F18 by accelerated electrons was revealed. This rate was three orders of magnitude higher than that of the ordinary fullerite C-60. High rate of the modification was assumed to be caused by the efficient mechanism of fragmentation of C60F18 molecule compared to the mechanism of polymerization of fullerite C-60. The conclusion has been made that films of fluorinated fullerites are perspective as an electron-beam resist for dry nanolithography.
引用
收藏
页码：446 / 449
页数：4
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