Study of the effects of low-energy electron bombardment during the chemical vapor deposition of diamond

被引：5

作者：

González, JA ^{[1
]}

Figueroa, OL ^{[1
]}

Weiner, BR ^{[1
]}

Morell, G ^{[1
]}

机构：

[1] Univ Puerto Rico, Dept Phys Sci, San Juan, PR 00931 USA

来源：

JOURNAL OF MATERIALS RESEARCH | 2001年 / 16卷 / 01期

关键词：

D O I：

10.1557/JMR.2001.0044

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The effects of low-energy electron bombardment during the chemical vapor deposition of diamond were studied. The film growth was monitored in real time with in situ phase-modulated ellipsometry, in order to trigger the electron bombardment at different growth stages. Ex situ Raman spectroscopy and scanning electron microscopy were employed to evaluate the crystalline quality and the morphology of the grown films, respectively. The results indicated that triggering the electron bombardment after high-quality scattered diamond crystallites had formed results in finely grained smoother films of similar diamond yield and crystalline quality as those grown without bombardment. However, the electron bombardment deteriorates the film crystalline quality and the diamond yield when it was triggered from the start of deposition.

引用

页码：293 / 295

页数：3

共 9 条

[1] SAMPLE DEPOLARIZATION EFFECTS FROM THIN-FILMS OF ZNS ON GAAS AS MEASURED BY SPECTROSCOPIC ELLIPSOMETRY [J].

JELLISON, GE ;

MCCAMY, JW .

APPLIED PHYSICS LETTERS, 1992, 61 (05) :512-514

[2] Rotating-compensator multichannel ellipsometry for characterization of the evolution of nonuniformities in diamond thin-film growth [J].

Lee, J ;

Rovira, PI ;

An, I ;

Collins, RW .

APPLIED PHYSICS LETTERS, 1998, 72 (08) :900-902

[3] POLYCRYSTALLINE DIAMOND PHOTOCONDUCTIVE DEVICE WITH HIGH UV-VISIBLE DISCRIMINATION [J].

MCKEAG, RD ;

CHAN, SSM ;

JACKMAN, RB .

APPLIED PHYSICS LETTERS, 1995, 67 (15) :2117-2119

[4] Measurement and analysis of diamond Raman bandwidths [J].

Morell, G ;

Quinones, O ;

Diaz, Y ;

Vargas, IM ;

Weiner, BR ;

Katiyar, RS .

[5] In situ measurements of methane and acetylene concentrations in a CVD reactor by infrared spectroscopy [J].

Morell, G ;

Canales, E ;

Weiner, BR .

[6]

NEMANICH RJ, 1991, ANNU REV MATER SCI, V21, P535

[7] Diamond ultraviolet photovoltaic cell obtained by lithium and boron doping [J].

Popovici, G ;

Melnikov, A ;

Varichenko, VV ;

Sung, T ;

Prelas, MA ;

Wilson, RG ;

Loyalka, SK .

JOURNAL OF APPLIED PHYSICS, 1997, 81 (05) :2429-2431

[8] GROWTH OF DIAMOND THIN-FILMS BY ELECTRON ASSISTED CHEMICAL VAPOR-DEPOSITION [J].

SAWABE, A ;

INUZUKA, T .

APPLIED PHYSICS LETTERS, 1985, 46 (02) :146-147

[9]

Yoder M. N., 1994, SYNTHETIC DIAMOND EM, P4

← 1 →