Tungsten-Microhotplate-Array-Based Pirani Vacuum Sensor System With On-Chip Digital Front-End Processor

被引：13

作者：

Wang, Jiaqi ^{[1
,2
]}

Tang, Zhenan ^{[1
,2
]}

Li, Jinfeng ^{[3
]}

机构：

[1] Dalian Univ Technol, Dalian Inst Semicond Technol, Dalian 116024, Peoples R China

[2] Dalian Univ Technol, Sch Elect Sci & Technol, Dalian 116024, Peoples R China

[3] Shenyang Univ Chem Technol, Coll Informat Engn, Shenyang 110142, Peoples R China

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2011年 / 20卷 / 04期

基金：

中国国家自然科学基金;

关键词：

Microelectromechanical systems (MEMS); Pirani pressure sensor; pressure sensor; system on chip (SOC); tungsten microhotplate; PRESSURE SENSOR; GAUGE;

D O I：

10.1109/JMEMS.2011.2148157

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An integrated CMOS-compatible Pirani vacuum sensor system has been developed in this paper, which consists of a tungsten microhotplate array with four same microhotplates in series, a constant current circuit, an 8-b A/D converter, and a digital interface. With a tiny amount of the external components, a gas pressure between 10(-1) and 10(5) Pa can be sampled, digitized, and real-time displayed by a LED. It can also be transferred to an external process unit, which makes it suitable for application in a gas pressure control system. The sensor system is implemented in a 0.5-mu m CMOS process. When the sensor system works at 5-V voltage and 2.5-MHz clock input, the total power consumption is 350 mW, and the temperature increase of each microhotplate is 35 degrees C.

引用

页码：834 / 841

页数：8