Electron effective mean free path and thermal conductivity predictions of metallic thin films

被引：39

作者：

Jin, Jae Sik ^{[2
]}

Lee, Joon Sik ^{[1
]}

Kwon, Ohmyoung ^{[3
]}

机构：

[1] Seoul Natl Univ, Sch Mech & Aerosp Engn, Inst Adv Machinery & Design, Seoul 151742, South Korea

[2] Seoul Natl Univ, Micro Thermal Syst Res Ctr, Seoul 151742, South Korea

[3] Korea Univ, Dept Mech Engn, Seoul 136701, South Korea

来源：

APPLIED PHYSICS LETTERS | 2008年 / 92卷 / 17期

关键词：

D O I：

10.1063/1.2917454

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A simple model of the electron effective mean free path (MFP) in thin metal films is proposed, and the thermal conductivities of aluminum and copper thin films are calculated by solving the Boltzmann transport equation (BTE). In the modeling of the electron effective MFP, the combined contributions of the bulk MFP and the film MFP are taken into account. The proposed effective electron MFP model is incorporated with the gray version of BTE through the "transport" relaxation time. The present model is verified against the experimental thermal conductivity data as a function of the film thickness. (C) 2008 American Institute of Physics.

引用

页数：3

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