A novel high-throughput fatigue testing method for metallic thin films

被引：42

作者：

Burger, Sofie ^{[1
]}

Eberl, Christoph ^{[1
]}

Siegel, Alexander ^{[2
]}

Ludwig, Alfred ^{[2
]}

Kraft, Oliver ^{[1
]}

机构：

[1] KIT, Inst Appl Mat, D-76131 Karlsruhe, Germany

[2] Ruhr Univ Bochum, Inst Werkstoffe Werkstoffe Mikrotech, D-44780 Bochum, Germany

来源：

SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS | 2011年 / 12卷 / 05期

关键词：

fatigue; thin films; beam bending; high-throughput; materials libraries combinatorial methodology; SHAPE-MEMORY ALLOYS; HIGH-CYCLE FATIGUE; COMPOSITION SPREADS; LENGTH-SCALE;

D O I：

10.1088/1468-6996/12/5/054202

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin films are used in a wide variety of computing and communication applications although their fatigue behavior and its dependence on alloying elements are not very well known. In this paper, we present an experimental implementation of a novel high-throughput fatigue testing method for metallic thin films. The methodology uses the fact that the surface strain amplitude of a vibrating cantilever decreases linearly from the fixed end to the free end. Therefore, a thin film attached to a vibrating cantilever will experience a gradient of strain and corresponding stress amplitudes along the cantilever. Each cantilever can be used to extract a lifetime diagram by measuring the fatigue-induced damage front that progresses along the cantilever during up to 10(8) load cycles.

引用

收藏

页数：7

相关论文

共 24 条

[1] Overview no. 130 - Size effects in materials due to microstructural and dimensional constraints: A comparative review [J].

Arzt, E .

ACTA MATERIALIA, 1998, 46 (16) :5611-5626

[2] Damage analysis in Al thin films fatigued at ultrahigh frequencies [J].

Eberl, Christoph ;

Spolenak, Ralph ;

Kraft, Oliver ;

Kubat, Franz ;

Ruile, Werner ;

Arzt, Eduard .

JOURNAL OF APPLIED PHYSICS, 2006, 99 (11)

[3] Combinatorial investigation of ferromagnetic shape-memory alloys in the Ni-Mn-Al ternary system using a composition spread technique [J].

Famodu, OO ;

Hattrick-Simpers, J ;

Aronova, M ;

Chang, KS ;

Murakami, M ;

Wuttig, M ;

Okazaki, T ;

Furuya, Y ;

Knauss, LA ;

Bendersky, LA ;

Biancaniello, FS ;

Takeuchi, I .

MATERIALS TRANSACTIONS, 2004, 45 (02) :173-177

[4] Combinatorial investigation of magnetostriction in Fe-Ga and Fe-Ga-Al [J].

Hattrick-Simpers, Jason R. ;

Hunter, Dwight ;

Craciunescu, Corneliu M. ;

Jang, Kyu Sung ;

Murakami, Makoto ;

Cullen, James ;

Wuttig, Manfred ;

Takeuchi, Ichiro ;

Lofland, Samuel E. ;

Benderksy, Leonid ;

Woo, Noble ;

Van Dover, Robert Bruce ;

Takahashi, Toshiya ;

Furuya, Yasubumi .

APPLIED PHYSICS LETTERS, 2008, 93 (10)

[5] High-throughput analysis of thin-film stresses using arrays of micromachined cantilever beams [J].

Kim, Hyun-Jong ;

Han, Jun-Hyun ;

Kaiser, Roy ;

Oh, Kyu Hwan ;

Vlassak, Joost J. .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2008, 79 (04)

[6] On plasticity and fracture of nano structured Cu/X (X = Au, Cr) multilayers: The effects of length scale and interface/boundary [J].

Li, Y. P. ;

Zhang, G. P. .

ACTA MATERIALIA, 2010, 58 (11) :3877-3887

[7] Nano-chemo-mechanical sensor array platform for high-throughput chemical analysis [J].

Lim, Si-Hyung Shawn ;

Raorane, Digvijay ;

Satyanarayana, Srinath ;

Majumdar, Arunava .

SENSORS AND ACTUATORS B-CHEMICAL, 2006, 119 (02) :466-474

[8] Opto-mechanical characterization of hydrogen storage properties of Mg-Ni thin film composition spreads [J].

Ludwig, A. ;

Cao, J. ;

Dam, B. ;

Gremaud, R. .

APPLIED SURFACE SCIENCE, 2007, 254 (03) :682-686

[9] High-throughput characterization of hydrogen storage materials using thin films on micromachined Si substrates [J].

Ludwig, A. ;

Cao, J. ;

Savan, A. ;

Ehmann, M. .

JOURNAL OF ALLOYS AND COMPOUNDS, 2007, 446 :516-521

[10] MEMS tools for combinatorial materials processing and high-throughput characterization [J].

Ludwig, A ;

Cao, J ;

Brugger, J ;

Takeuchi, I .

MEASUREMENT SCIENCE AND TECHNOLOGY, 2005, 16 (01) :111-118