Two dimensional hard x-ray nanofocusing with crossed multilayer Laue lenses

被引：79

作者：

Yan, Hanfei ^{[1
,3
]}

Rose, Volker ^{[2
]}

Shu, Deming ^{[2
]}

Lima, Enju ^{[3
]}

Kang, Hyon Chol ^{[4
,5
]}

Conley, Ray ^{[2
,3
]}

Liu, Chian ^{[2
]}

Jahedi, Nima ^{[2
]}

Macrander, Albert T. ^{[2
]}

Stephenson, G. Brian ^{[1
]}

Holt, Martin ^{[1
]}

Chu, Yong S. ^{[3
]}

Lu, Ming ^{[6
]}

Maser, Joerg ^{[1
,2
]}

机构：

[1] Argonne Natl Lab, Ctr Nanoscale Mat, Argonne, IL 60439 USA

[2] Argonne Natl Lab, Adv Photon Source, Argonne, IL 60439 USA

[3] Brookhaven Natl Lab, Natl Synchrotron Light Source 2, Upton, NY 11973 USA

[4] Chosun Univ, Dept Adv Mat Engn, Kwangju 501759, South Korea

[5] Chosun Univ, Educ Ctr Mould Technol Adv Mat & Parts BK21, Kwangju 501759, South Korea

[6] Brookhaven Natl Lab, Ctr Funct Nanomat, Upton, NY 11973 USA

来源：

OPTICS EXPRESS | 2011年 / 19卷 / 16期

关键词：

RESOLUTION;

D O I：

10.1364/OE.19.015069

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Hard x-ray microscopy with nanometer resolution will open frontiers in the study of materials and devices, environmental sciences, and life sciences by utilizing the unique characterization capabilities of x-rays. Here we report two-dimensional nanofocusing by multilayer Laue lenses (MLLs), a type of diffractive optics that is in principle capable of focusing x-rays to 1 nm. We demonstrate focusing to a 25 x 27 nm(2) FWHM spot with an efficiency of 2% at a photon energy of 12 keV, and to a 25 x 40 nm(2) FWHM spot with an efficiency of 17% at a photon energy of 19.5 keV. (C) 2011 Optical Society of America

引用

页码：15069 / 15076

页数：8

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