Electrically coupled MEMS Oscillators

In this paper, we demonstrate synchronization of two electrically coupled MEMS oscillators incorporating nearly identical silicon tuning fork microresonators. It is seen that as the output of the oscillators are coupled, they exhibit a synchronized response wherein the output amplitudes and signal-to-noise ratios of the two oscillators are improved relative to the case where the two oscillators are uncoupled. The observed output frequency of each oscillator before coupling is 219402.4 Hz and 219403.6 Hz respectively. In contrast, when the oscillators are driven simultaneously, they lock at a common output frequency of 219401.3 Hz and their outputs are found to be out-of-phase with respect to each other. A 6 dBm gain in output power and a reduction in the phase fluctuations of the output signal are observed for the coupled oscillators compared to the case when the oscillators are uncoupled.