Magnetic bistable micro-actuator with integrated permanent magnets

被引：29
|
作者：
Dieppedale, C [1 ]
Desloges, B [1 ]
Rostaing, H [1 ]
Delamare, J [1 ]
Cugat, O [1 ]
Meunier-Carus, J [1 ]
机构：
[1] CEA, LETI, F-38054 Grenoble, France
来源：
PROCEEDINGS OF THE IEEE SENSORS 2004, VOLS 1-3 | 2004年
关键词：
magnetic actuator; permanent magnet; electroplating;
D O I：
10.1109/ICSENS.2004.1426208
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A new magnetic micro-actuator with integrated permanent magnets has been developed. The design of this device with a levitating mobile magnet is a real innovation and is patented. The structure was modeled using analytical and numerical calculations. Furthermore, the fabrication feasibility, using collective micro-technology processes, has recently been demonstrated.
引用
收藏
页码：493 / 496
页数：4
相关论文
共 50 条
  • [31] Highly Efficient Passive Thermal Micro-Actuator
    Steiner, Harald
    Keplinger, Franz
    Schalko, Johannes
    Hortschitz, Wilfried
    Stifter, Michael
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2015, 24 (06) : 1981 - 1988
  • [32] Dynamics of SMA micro-actuator in biomechanical system
    Rusinek, Rafal
    Weremczuk, Andrzej
    Szymanski, Marcin
    Warminski, Jerzy
    INTERNATIONAL CONFERENCE ON ENGINEERING VIBRATION (ICOEV 2017), 2018, 148
  • [33] Flying-height adjustment of a magnetic head slider with a piezoelectric micro-actuator
    Kurita, Masayuki
    Tsuchiyama, Ryuuji
    Tokuyama, Mikio
    Xu, Junguo
    Yoshimura, Yasuhiro
    Kohira, Hidekazu
    Su, Lizhi
    Kato, Koji
    Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C, 2003, 69 (09): : 2452 - 2457
  • [34] Newly Designed Slider-Based Micro-Actuator for Magnetic Disk Drive
    Nojima, Yusuke
    Koganezawa, Shinji
    JOURNAL OF ADVANCED MECHANICAL DESIGN SYSTEMS AND MANUFACTURING, 2011, 5 (01): : 45 - 53
  • [35] Design and Modeling of an Efficiency Horizontal Thermal Micro-Actuator with Integrated Piezoresistors for Precise Control
    Zhang, Yan
    Lee, Dong-Weon
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2010, 10 (05) : 3311 - 3315
  • [36] Robust Voltage Control for an Electrostatic Micro-Actuator
    Kandula, Prasanth
    Dong, Lili
    JOURNAL OF DYNAMIC SYSTEMS MEASUREMENT AND CONTROL-TRANSACTIONS OF THE ASME, 2018, 140 (06):
  • [37] An Inertia Driven Micro-Actuator for Space Applications
    Mita, Makoto
    Ataka, Manabu
    Fujita, Hiroyuki
    Toshiyoshi, Hiroshi
    ELECTRONICS AND COMMUNICATIONS IN JAPAN, 2014, 97 (03) : 60 - 67
  • [38] DEVELOPMENT AND CHARACTERIZATION OF HIGH BANDWIDTH MICRO-ACTUATOR
    Solomon, John T.
    Kumar, Rajan
    Alvi, Farrukh S.
    PROCEEDINGS OF THE ASME FLUIDS ENGINEERING DIVISION SUMMER CONFERENCE - 2008, VOL 2, 2009, : 441 - 449
  • [39] A large-stroke electrostatic micro-actuator
    Towfighian, S.
    Seleim, A.
    Abdel-Rahman, E. M.
    Heppler, G. R.
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2011, 21 (07)
  • [40] Micro-Actuator for New Implantable Hearing Device
    Bernhard, Hans
    Stieger, Christof
    Perriard, Yves
    CONFERENCE RECORD OF THE 2006 IEEE INDUSTRY APPLICATIONS CONFERENCE, FORTY-FIRST IAS ANNUAL MEETING, VOL 1-5, 2006, : 369 - 372
12345