Structural and optical properties of Ni-embedded hydrogenated diamondlike carbon (Ni-DLC) prepared by co-deposition of RF-Sputtering and RF-PECVD method

被引：16

作者：

Mohammadinia, Elnaz ^{[1
]}

Elahi, Seyed Mohammad ^{[1
]}

Shahidi, Sheila ^{[2
]}

机构：

[1] Islamic Azad Univ, Sci & Res Branch, Dept Phys, Tehran, Iran

[2] Islamic Azad Univ, Arak Branch, Dept Text, Arak, Iran

来源：

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | 2018年 / 74卷

关键词：

RF-PECVD; Ni-DLC; Optical properties; A-CH; FILMS; EVOLUTION; GROWTH;

D O I：

10.1016/j.mssp.2017.10.003

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The composite nickel incorporated diamond-like carbon (Ni-DLC) thin films were produced by using RF-Sputtering and RF-Plasma enhanced chemical vapor deposition (RF-PECVD) from acetylene gas and nickel target in various RF powers. The structural and optical properties of thin films with increasing nickel content were investigated. X-Ray Diffraction (XRD) study shows completely an amorphous structure. The presence of Ni and carbon content were confirmed by Energy dispersive X-ray (EDX) Spectra. The optical band gap energy decreases from 4.58 to 3.66 eV with increasing applied power. The Urbach energy displays a decreasing trend from 0.472 to 0.189 eV. It is shown that the Ni content and the size of nanoparticles could be controlled by adjusting RF applied power.

引用

页码：7 / 12

页数：6

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