Low-temperature growth and post-growth annealing of GaAsSb

被引:11
|
作者
Sigmund, J [1 ]
Hartnagel, HL [1 ]
机构
[1] TU Darmstadt, Fachbereich Elektotech & Informat, Inst Hochfrequenztech, D-64283 Darmstadt, Germany
关键词
characterization; X-ray diffraction; molecular beam epitaxy; semiconducting gallium compounds;
D O I
10.1016/j.jcrysgro.2005.01.008
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
For the first time. low-temperature (LT) growth of GaAs1-ySby with y = 0.4 and 0.85, as well as the influence of a post-growth annealing is investigated and compared to LT-GaAs. The wafers were characterized by X-ray diffraction (XRD), Hall, and I-U characteristic measurements. The electrical resistance of the LT-GaAs0.6Sb0.4 wafer increases with increasing annealing temperature, similar to LT-GaAs. XRD measurements of unannealed and 600 ° C annealed samples show a lattice constant shift of LT-GaAs0.6Sb0.4 which is more than twice as large as for LT-GaAs. The LTGaAs0.15Sb0.85 wafer does not exhibit the typical dependencies of a non-stoichiometric layer on an annealing process: no monotonic increase in the resistance and no significant reduction of the lattice constant is observed. Hall measurements oil this wafer show a change from n- to p-type conductivity for high annealing temperatures. Hence, there is a certain Sb concentration where the effects observed in LT-GaAs vanish. © 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:209 / 213
页数:5
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