Structural and tribological properties of DC reactive magnetron sputtered titanium/titanium nitride (Ti/TiN) multilayered coatings

被引：69
作者：
Subramanian, B. [1 ]
Ananthakumar, R. [1 ]
Jayachandran, M. [1 ]
机构：
[1] Cent Electrochem Res Inst, Karaikkudi 630006, Tamil Nadu, India
来源：
SURFACE & COATINGS TECHNOLOGY | 2011年 / 205卷 / 11期
关键词：
Multilayers; Magnetron sputtering; Microhardness; XPS; Corrosion; PULSED-LASER DEPOSITION; THIN-FILMS; TITANIUM NITRIDE; CORROSION PERFORMANCE; SUBSTRATE-TEMPERATURE; HARD COATINGS; TIN; STEELS; MICROSTRUCTURE; METALLIZATION;
D O I：
10.1016/j.surfcoat.2010.12.016
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Ti/TiN multilayered coatings of 200 layers with the thickness of 1.5 mu m were deposited by a reactive DC magnetron sputtering technique using a mixture of Ar and N-2 gas. XRD technique was employed to elucidate the structural parameters. The presence of different phases like TiN, TiOxNy and TiO2 were confirmed by XPS analyses. The observation of longitudinal optic (LO) phonon modes in the Raman spectra confirmed the highly crystalline nature of the deposited films. A microhardness value of 25.5 GPa was observed for Ti/TiN multilayers. The observed lower friction coefficient value for the Ti/TiN multilayers on mild steel (MS) indicated that the stack layers have better wear resistance property. Results from the electrochemical polarization and impedance studies showed the favorable behavior of the Ti/TiN multilayers, which have improved the corrosion resistance property of MS in 3.5% NaCl solution. The results of this study demonstrate that these multilayers can improve the corrosion resistance of mild steel substrates. (C) 2010 Elsevier B.V. All rights reserved.
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收藏
页码：3485 / 3492
页数：8
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