Feedforward neural network methodology to characterize thin films by Electrostatic Force Microscopy

被引:5
|
作者
Konomi, M. [1 ]
Sacha, G. M. [1 ]
机构
[1] Univ Autonoma Madrid, Campus Cantoblanco, E-28049 Madrid, Spain
关键词
Thin film classification; Green function; Electrostatic signal simulation; Electrostatic Force Microscopy; Evolutionary algorithms; GENETIC ALGORITHM; OPTIMIZATION; SURFACE; PROBE;
D O I
10.1016/j.ultramic.2017.07.015
中图分类号
TH742 [显微镜];
学科分类号
摘要
The contribution of the present paper is in introducing a numerical method to improve the automatic characterization of thin films by increasing the effectiveness of numerical methods that take into account the macroscopic shape of the tip. To achieve this objective, we propose the combination of different feed-forward neural networks architectures adapted to the specific requirements of the physical system under study. First, an Adaline architecture is redefined as a linear combination of Green functions obtained from the Laplace equation. The learning process is also redefined to accurately calculate the electrostatic charges inside the tip. We demonstrate that a complete training set for the characterization of thin films can be easily obtained by this methodology. The characterization of the sample is developed in a second stage where a multilayer perceptron is adapted to work efficiently in experimental conditions where some experimental data can be lost. We demonstrate that a very efficient strategy is to use evolutionary algorithms as training method. By the modulation of the fit function, we can improve the network performance in the characterization of thin films where some information is missing or altered by experimental noise due to the small tip-sample working distances. By doing so, we can discriminate the conductive properties of thin films from force curves that have been altered explicitly to simulate realistic experimental conditions. (C) 2017 Elsevier B.V. All rights reserved.
引用
收藏
页码:243 / 248
页数:6
相关论文
共 32 条
  • [1] Influence of the Substrate and Tip Shape on the Characterization of Thin Films by Electrostatic Force Microscopy
    Sacha, G. M.
    IEEE TRANSACTIONS ON NANOTECHNOLOGY, 2013, 12 (02) : 152 - 156
  • [2] On the use of a neural network to characterize the plasma etching of SiON thin films
    B. Kim
    B. T. Lee
    K. K. Lee
    Journal of Materials Science: Materials in Electronics, 2005, 16 : 673 - 679
  • [3] Detection mechanism of spontaneous polarization in ferroelectric thin films using electrostatic force microscopy
    Lee, K
    Shin, H
    Moon, WK
    Jeon, JU
    Pak, YE
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1999, 38 (3A): : L264 - L266
  • [4] The use of artificial neural networks in electrostatic force microscopy
    Elena Castellano-Hernández
    Francisco B Rodríguez
    Eduardo Serrano
    Pablo Varona
    Gomez Monivas Sacha
    Nanoscale Research Letters, 7
  • [5] The use of artificial neural networks in electrostatic force microscopy
    Castellano-Hernandez, Elena
    Rodriguez, Francisco B.
    Serrano, Eduardo
    Varona, Pablo
    Monivas Sacha, Gomez
    NANOSCALE RESEARCH LETTERS, 2012, 7 : 1 - 6
  • [6] Injection and Retention Characterization of Trapped Charges in Electret Films by Electrostatic Force Microscopy and Kelvin Probe Force Microscopy
    Wang, Jin
    Zhang, He
    Cao, Guo-sheng
    Xie, Ling-hai
    Huang, Wei
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2020, 217 (20):
  • [7] Effect of crystallographic orientation upon switching properties of PZT films measured by electrostatic force microscopy
    Desfeux, R
    Da Costa, A
    Flambard, A
    Legrand, C
    Tondelier, D
    Poullain, G
    Bouregba, R
    APPLIED SURFACE SCIENCE, 2004, 228 (1-4) : 34 - 39
  • [8] Finite-size effects and analytical modeling of electrostatic force microscopy applied to dielectric films
    Gomila, G.
    Gramse, G.
    Fumagalli, L.
    NANOTECHNOLOGY, 2014, 25 (25)
  • [9] Thickness measurement of thin films using atomic force microscopy based scratching
    Vasic, Borislav
    Askrabic, Sonja
    SURFACE TOPOGRAPHY-METROLOGY AND PROPERTIES, 2024, 12 (02):
  • [10] Use of a neural network to characterize the charge density of PECVD-silicon nitride films
    Kim, Byungwhan
    Kwon, Sang Hee
    METALS AND MATERIALS INTERNATIONAL, 2007, 13 (06) : 495 - 499