Systemic errors calibration in dynamic stitching interferometry

被引：1

作者：

Wu, Xin ^{[1
,2
]}

Qi, Te ^{[1
]}

Yu, Yingjie ^{[1
]}

Zhang, Linna ^{[3
]}

机构：

[1] Shanghai Univ, Dept Precis Mech Engn, Shanghai 200072, Peoples R China

[2] Univ Huddersfield, Sch Comp & Engn, Ctr Precis Technol, Huddersfield HD1 3DH, W Yorkshire, England

[3] Zhengzhou Univ, Inst Engn Mech, Zhengzhou 450001, Peoples R China

来源：

OPTICAL MICRO- AND NANOMETROLOGY VI | 2016年 / 9890卷

关键词：

systemic error; pseudo shearing; subaperture stitching; dynamic interferometry; ABSOLUTE SURFACE METROLOGY;

D O I：

10.1117/12.2231397

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The systemic error is the main error sauce in subaperture stitching calculation. In this paper, a systemic error calibration method is proposed based on pseudo shearing. This method is suitable in dynamic stitching interferometry for large optical plane. The feasibility is vibrated by some simulations and experiments.

引用

页数：6

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