Moisture dry-down in high purity hydrogen chloride

被引：0

作者：

Ma, C ^{[1
]}

Athalye, A ^{[1
]}

Fruhberger, B ^{[1
]}

Ezell, E ^{[1
]}

机构：

[1] BOC Edwards, Murray Hill, NJ 07974 USA

来源：

INSTITUTE OF ENVIRONMENTAL SCIENCES AND TECHNOLOGY, 1998 PROCEEDINGS - CONTAMINATION CONTROL | 1998年

关键词：

APIMS; dry-down; FTIR; hydrogen chloride (HC1); modeling; moisture (H2O); stainless steel electropolished (SSEP) surface; XPS;

D O I：

暂无

中图分类号：

TU [建筑科学];

学科分类号：

0813 ;

摘要：

As part of its total systems design approach, BOC Edwards has developed a modeling capability to address customer concerns on reactive-gas delivery system start-up time and on moisture and metallic contamination possible following system upsets. This work represents a refinement of our analytical and modeling tools in a continuing effort to upgrade our systems design capability. Here we describe a recently developed advanced technique based on Atmospheric Pressure Ionization Mass Spectrometry (APIMS) to measure moisture impurity in Hydrogen Chloride (HCl) gas. Aided by the APIMS fast response characteristic, newly obtained experimental results are presented here for real-time moisture dry-down in HCl flow in 20-foot-long, 1/4 " OD stainless steel electroporished (SSEP) 316L tubes. Interactions between stainless steel metal surfaces and HCl gas were studied using X-ray photo-electron spectroscopy (XPS). The gas systems modeling capability developed from precious moisture transport work is demonstrated here for the dry-down of a gas distribution system for the bulk delivery of HCl.

引用

页码：285 / 293

页数：9