Reduction of particulate density in BN films prepared by pulsed laser deposition

被引：0
|
作者：
Reisse, Guenter [1 ]
Rost, Dirk [1 ]
Weissmantel, Steffen [1 ]
机构：
[1] Univ Appl Sci, Hsch Mittweida, Technikumpl 17, D-09648 Mittweida, Germany
来源：
COLA'05: 8TH INTERNATIONAL CONFERENCE ON LASER ABLATION | 2007年 / 59卷
关键词：
D O I：
10.1088/1742-6596/59/1/097
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Various measures to reduce the incorporation of particulates (droplets) into boron nitride films prepared by pulsed laser deposition were investigated. These measures include the use of magnetic fields aimed at the separation of the ionized atomic species and the particulates on their way from the target to the substrate and the use of a second laser beam aimed at the destruction of the particulates by evaporation.
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页码：453 / +
页数：2
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