SiC-Based MIS Gas Sensor for High Water Vapor Environments

被引：0

作者：

Casals, O. ^{[1
]}

Becker, Th. ^{[2
]}

Godignon, P. ^{[3
]}

Romano-Rodriguez, A. ^{[1
]}

机构：

[1] Univ Barcelona, MIND Dept Elect IN2UB, E-08028 Barcelona, Spain

[2] EADS Deutschland GmbH, Corp Res Ctr, D-81663 Munich, Germany

[3] CSIC, IMB CNM, E-08193 Bellaterra, Spain

来源：

EUROSENSORS XXV | 2011年 / 25卷

关键词：

gas sensor; water vapor; metal-insulator-semiconductor; MIS; SiC; hydrogen; CO; ethane; ethene; fuel cell;

D O I：

10.1016/j.proeng.2011.12.326

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In this work we will prove that SiC-based MIS capacitors can work as efficient gas sensors in environments with extremely high concentrations of water vapour, still being sensitive to hydrogen, CO and hydrocarbons. This makes these devices suitable for long term and efficient operation in harsh environments, such as the exhaust gas atmosphere of hydrogen or hydrocarbon-based fuel cells. (C) 2011 Published by Elsevier Ltd.

引用

页数：4

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