共 50 条
[23]
WAVE-PROPAGATION AND PLASMA UNIFORMITY IN AN ELECTRON-CYCLOTRON-RESONANCE PLASMA ETCH REACTOR
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS,
1993, 32 (6B)
:3007-3012
[24]
Simulation of plasma confinement in an electron cyclotron resonance zero-B trap
[J].
REVISTA ITECKNE,
2015, 12 (02)
:111-118
[25]
Modeling of Coulomb collisions in a kinetic description of the electron cyclotron resonance plasma heating
[J].
Plasma Physics Reports,
2002, 28
:46-56
[30]
Pulsed plasma processing for reduction of profile distortion induced by charge buildup in electron cyclotron resonance plasma
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1996, 35 (4B)
:2450-2455