3D FE simulation of H2SAW gas sensor

被引：47

作者：

Atashbar, MZ ^{[1
]}

Bazuin, BJ ^{[1
]}

Simpeh, M ^{[1
]}

Krishnamurthy, S ^{[1
]}

机构：

[1] Western Michigan Univ, Dept Elect & Comp Engn, Kalamazoo, MI 49008 USA

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2005年 / 111卷

关键词：

surface acoustic wave; palladium thin film; three-dimensional finite element (3D FE); ANSYS; hydrogen sensor;

D O I：

10.1016/j.snb.2005.06.054

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

In this work, a three-dimensional finite element (3D FE) model of a two-port surface acoustic wave (SAW) delay line based hydrogen sensor on XY lithium niobate (LiNbO3) substrate with a palladium thin film is developed and simulated. This simulation is performed using ANSYS Version 6.1 platform. Changes in the propagation characteristics of the SAW in terms of the time delay in the voltage and particle displacements due to exposure of palladium thin film to hydrogen and insertion loss of the device are studied. Also, the impulse response of the device is simulated, from which the frequency response and hence the center frequency and insertion loss of the sensor is determined. The 3D representation of the surface acoustic wave propagation on the substrate is demonstrated. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：213 / 218

页数：6

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