A novel DC magnetron sputtering facility for space research and synchrotron radiation optics

被引：1
作者：
Hussain, AM [1 ]
Christensen, FE [1 ]
Pareschi, G [1 ]
Poulsen, HF [1 ]
机构：
[1] Danish Space Res Inst, DK-2100 Copenhagen, Denmark
来源：
X-RAY OPTICS, INSTRUMENTS, AND MISSIONS | 1998年 / 3444卷
关键词：
DC-magnetron sputtering; multilayer mirrors; X-ray telescopes; X-ray optics; vacuum technology;
D O I：
10.1117/12.331292
中图分类号：
P1 [天文学];
学科分类号：
0704 ;
摘要：
A new DC magnetron sputtering facility has been build up at the Danish Space Research Institute (DSRI), specially designed to enable uniform coatings of large area curved optics, such as Wolter-I mirror optics used in space telescopes and curved optics used in synchrotron radiation facilities. The paper is a brief description of this new facility and the future applications.
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收藏
页码：443 / 450
页数：8
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