共 21 条
[2]
CHAPMAN B, 1980, GLOW DISCHARGE PROCE, P60
[5]
ECKERTOVA L, 1986, PHYS THIN FILMS, P203
[9]
DEPOSITION OF DIAMOND-LIKE CARBON USING A PLANAR RADIO-FREQUENCY INDUCTION PLASMA
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1994, 12 (04)
:1576-1582
[10]
THE EFFECT OF RADIO-FREQUENCY SUBSTRATE BIASING IN THE DEPOSITION OF DIAMOND-LIKE CARBON-FILMS IN AN ELECTRON-CYCLOTRON RESONANCE DISCHARGE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1991, 9 (03)
:1129-1133