P-type ZnO thin films via phosphorus doping

被引:0
|
作者
Norton, D. P. [1 ]
Kim, H. S. [1 ]
Erie, J. M. [1 ]
Pearton, S. J. [1 ]
Wang, Y. L. [1 ]
Ren, F. [2 ]
机构
[1] Univ Florida, Dept Mat Sci & Engn, Gainesville, FL 32611 USA
[2] Univ Florida, Dept Chem Engn, Gainesville, FL USA
来源
基金
美国国家科学基金会;
关键词
ZnO; p-type doping; pulsed laser deposition;
D O I
10.1117/12.785467
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
ZnO is a wide bandgap semiconductor that exhibits properties that are near-ideal for light-emitting diodes, but presents materials challenges that must be overcome in order to achieve highly efficient light emission. The most significant issue with ZnO is p-type doping. Related materials issues include understanding electron-hole transport across pn junctions, as well as understanding and minimizing leakage current paths within the bulk and on the surface. In this paper, the formation and properties of phosphorus-doped Zn1-xMgxO films, ZnO-based pn homojunctions and heterojunctions is discussed. The behavior of phosphorus within the ZnO and ZnMgO matrices will be described. Comparisons with other acceptor dopants will be made. Discussion will include stability of transport properties, stabilization of surfaces, and device characteristics.
引用
收藏
页数:8
相关论文
共 50 条
  • [41] Co-doping deposition of p-type ZnO thin films using KrF excimer laser ablation
    Ebihara, K
    Ohshima, T
    Ikegami, T
    Asumussen, J
    Thareja, RK
    CRYSTALLINE OXIDE-SILICON HETEROSTRUCTURES AND OXIDE OPTOELECTRONICS, 2003, 747 : 241 - 246
  • [42] Growth of p-type ZnO thin films by (N, Ga) co-doping using DMHy dopant
    Wang, H.
    Ho, H. P.
    Lo, K. C.
    Cheah, K. W.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2007, 40 (15) : 4682 - 4685
  • [43] P-type carbon-doped ZnO thin films by MOCVD
    Tan, S. T.
    Sun, X. W.
    Lo, G. Q.
    Zhang, X. H.
    Chua, S. J.
    AD'07: Proceedings of Asia Display 2007, Vols 1 and 2, 2007, : 662 - 662
  • [44] Preparation of p-type ZnO thin films by RF diode sputtering
    Shtereva, K.
    Novotny, I.
    Tvarozek, V.
    Srnanek, R.
    Kovac, J.
    Sutta, P.
    ASDAM '06: SIXTH INTERNATIONAL CONFERENCE ON ADVANCED SEMICONDUCTOR DEVICES AND MICROSYSTEMS, CONFERENCE PROCEEDINGS, 2006, : 33 - 38
  • [45] Synthesis of p-type ZnO films
    Ryu, YR
    Zhu, S
    Look, DC
    Wrobel, JM
    Jeong, HM
    White, HW
    JOURNAL OF CRYSTAL GROWTH, 2000, 216 (1-4) : 330 - 334
  • [46] p-Type Formation Mechanism of Codoped and Tridoped ZnO Thin Films
    Balakrishnan, L.
    Barman, S. R.
    Gopalakrishnan, N.
    SCIENCE OF ADVANCED MATERIALS, 2013, 5 (05) : 462 - 468
  • [47] Effect of boron on nitrogen doped p-type ZnO thin films
    Zhao, Peng-Cheng
    Zhang, Zhen-Zhong
    Yao, Bin
    Li, Bing-Hui
    Wang, Shuang-Peng
    Jiang, Ming-Ming
    Zhao, Dong-Xu
    Shan, Chong-Xin
    Liu, Lei
    Shen, De-Zhen
    Faguang Xuebao/Chinese Journal of Luminescence, 2014, 35 (07): : 795 - 799
  • [48] P-type conduction in sputtered ZnO thin films doped by nitrogen
    Shtereva, K.
    Tvarozek, V.
    Novotny, I.
    Kovac, J.
    Sutta, P.
    Vincze, A.
    2006 25TH INTERNATIONAL CONFERENCE ON MICROELECTRONICS, VOLS 1 AND 2, PROCEEDINGS, 2006, : 357 - +
  • [49] Synthesis of p-type ZnO thin films and their optical and electric properties
    Li, Yun-Hui
    Zhang, Qi-Feng
    Sun, Hui
    Xue, Zeng-Quan
    Wu, Jin-Lei
    Cailiao Kexue yu Gongyi/Material Science and Technology, 2009, 17 (05): : 686 - 690
  • [50] Mechanism of p-type conductivity for phosphorus-doped ZnO thin film
    Yao, B.
    Xie, Y. P.
    Cong, C. X.
    Zhao, H. J.
    Sui, Y. R.
    Yang, T.
    He, Q.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2009, 42 (01)