Scanning near-field cathodoluminescence investigations

被引：0

作者：

Cramer, RM ^{[1
]}

Heiderhoff, R ^{[1
]}

Balk, LJ ^{[1
]}

机构：

[1] Berg Univ Gesamthsch Wuppertal, Lehrstuhl Elekt, D-42097 Wuppertal, Germany

来源：

SCANNING | 1998年 / 20卷 / 06期

关键词：

cathodoluminescence; SEM; SPM; near-field; SNOM;

D O I：

暂无

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

By implementing a scanning near-field optical microscope into the analysis chamber of a scanning electron microscope, the light emitted due to cathodoluminescence can be locally detected in the near-field using tapered, coated optical fibers. In addition to the ability to perform contactless measurements of local diffusion lengths, the achievable spatial resolution can be increased to about 50 nanometers.

引用

页码：433 / 435

页数：3

共 9 条

[1] Nanoscopic evaluation of semiconductor properties by scanning probe microscopies
Balk, LJ
Heiderhoff, R
Koschinski, P
Maywald, M
[J]. MICROELECTRONICS AND RELIABILITY, 1996, 36 (11-12): : 1767 - 1774
[2] Characterization of surface topography by SEM and SFM: Problems and solutions
Castle, JE
Zhdan, PA
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1997, 30 (05) : 722 - 740
[3] CATHODOLUMINESCENCE IMAGING OF DEFECTS AND IMPURITIES IN DIAMOND FILMS GROWN BY CHEMICAL VAPOR-DEPOSITION
GRAHAM, RJ
MOUSTAKAS, TD
DISKO, MM
[J]. JOURNAL OF APPLIED PHYSICS, 1991, 69 (05) : 3212 - 3218
[4] CATHODOLUMINESCENCE INVESTIGATION OF IMPURITIES AND DEFECTS IN SINGLE-CRYSTAL DIAMOND GROWN BY THE COMBUSTION-FLAME METHOD
GRAHAM, RJ
RAVI, KV
[J]. APPLIED PHYSICS LETTERS, 1992, 60 (11) : 1310 - 1312
[5] Heiderhoff R, 1996, 1996 IEEE INTERNATIONAL RELIABILITY PHYSICS PROCEEDINGS, 34TH ANNUAL, P366
[6] PIEZOELECTRIC TIP-SAMPLE DISTANCE CONTROL FOR NEAR-FIELD OPTICAL MICROSCOPES
KARRAI, K
GROBER, RD
[J]. APPLIED PHYSICS LETTERS, 1995, 66 (14) : 1842 - 1844
[7] THE CHILDREN OF THE STM
POOL, R
[J]. SCIENCE, 1990, 247 (4943) : 634 - 636
[8] WANG J, 1991, J PHYSIQUE, V4, P125
[9] LUMINESCENCE FROM GOLD-PASSIVATED GALLIUM-ARSENIDE SURFACES EXCITED WITH A SCANNING TUNNELING MICROSCOPE
WENDEROTH, M
GREGOR, MJ
ULBRICH, RG
[J]. SOLID STATE COMMUNICATIONS, 1992, 83 (08) : 535 - 537

← 1 →